Part Number Description 000-ACH01-00 CABLE HEATER BACK CHAMBER 000-ACH02-00 CABLE HEATER SIDE CHAMBER 000-VACSW-00 CABLE, ADAPT, VACUUM SWITCH 0010-77461 E-CHAINFLEX ASSY 0090-09016 FEED THRU ASSY, CAP SENSOR 0090-77026 HCLU/PEDESTAL SENSOR ASSY 0090-77034 MOD PAD CONDITIONER SLURRY DISP. 0140-00014 GATE VALVE HARNESS ASSY 0140-00055 HARNESS ASSY, WAFER ORIENTER POSITION F 0140-00144 HARNESS ASSY, POWER/FUSE, ORIENTER. 0140-00278 HARNESS,ASSY. ASP+ CHAMBER, MCE 0140-00334 HARNESS ASSY,LLA & LLB MODULE STD CNTRLS 0140-00343 HARNESS ASSY, POS. C & D PC II INTC, WI 0140-00451 CABLE ASSY, MODIFIED FACILITIES PANEL 0140-00460 CHAMBER HARNESS W/UWAVE PHII WXZ 0140-00481 HARNESS ASSY, CNTRL, CNTR, DXZ, FLUORIN 0140-00577 ASSY, HARNESS, HIGH PRESSURE, INTERLOCK, WXZ 0140-00604 LUXTRON CONTROLLER CABLE 0140-00605 CATHODE TEMP SENSOR 0140-00718 HARNESS ASSY. CHAMBER INTERCONNECT W/TEMP MONITOR 0140-00724 HARNESS CH CONTROLLERS TO HTR DRIVERS 0140-00728 HARNESS ASSY MFC MCE GP 0140-00743 COMMON CHAMBER, RTP, CMF 0140-00770 HARNESS- REACTIVE PC W/ RGA @ CG INT. 0140-00782 CABLE ASSY RPS2 NF3 OVER PRESSURE 0140-00782,001 CABLE ASSY RPS2 NF3 OVER PRESSURE 0140-00853 HARNESS ASSY, IHC TO SYSTEM I/O 0140-00938 HARNESS ASSY, SERIPLEX THIRD GENRACK SIG 0140-01021 HARNESS ASSY, ETCH, CENTURA 0140-01064 SEIKO SEIKI STP-A2203 INTERCONNECT, DPS 0140-01340 AUTO BIAS INTERCONNECT 0140-01622 HARNESS ASSY, MCA+ AC BOX 0140-01640 HARNESS ASSY, EMO FRONT BEZEL INTERCONNECT 0140-01745 HARNESS ASSY, INTERCONNECT, PVD CHAMBER 0140-01886 HARNESS ASSY SERVICE/PROCESS MANOMETER 0140-01888 HARNESS ASSY - THROTTLING GATE VALVE DPS+ 0140-01927 HARNESS INTERONNECT PVD CH WB CH 0140-02143 HARNESS ASSY ENHANCED ROTATION RPM FAULT 0140-02250 HARNESS ASSY, NITRIDE 550 AC CONDUIT, CH A 0140-02251 HARNESS ASSY, NITRIDE 550 AC CONDUIT CH B 0140-02307 HARNESS ASSY, OVER TEMP EXT LLB SIDE 0140-02417 HARNESS, INTRCNT ISO XFRMR & HTR DRVR AC 200MM/300MM PRODUCER 0140-02644 HARNESS ASSY., DOOR OPEN/CLOSE FOR INTEG 0140-02654 HARNESS ASSY SMIF LLA INTERCONNECT PHASE 2 0140-02655 HARNESS ASSY SMIF LLB INTERCONNECT PHASE 2 0140-02726 HARNESS ASSY, LF RF CONTROL, PRODUCER S 0140-02811 CABLE REMOTE START/STOP CONTROLLER BULKHEAD 0140-02822 HARNESS REMOTE START/STOP CABLE MAINFRAME BULKHEAD 0140-02823 CABLE REMOTE START/STOP CONTROLLER BULKHEAD 0140-03221 HARNESS ASSY W/SHIELD, DUAL ZONE, IHC IN 0140-03514 MAGNET DRIVER HARNESS ASSY 0140-03799-001 MSCOOL CHAMBER HARNESS, CENTURA 5200 0140-04267 HRNS ASSY MF INTERCONNECT 0140-04700 HARNESS ASSY WTR FLOW INTLK MW EV S ENDPOINT HDP-CVD 0140-04717 CH PNEUMATICS, RPN TPCC 0140-04819 CABLE BULKHEAD-PLATEN ISRM 0140-05086 CABLE POWER PLATEN 1 CNTRL 0140-05087 CABLE POWER PLATEN 2 CNTRL-MOTOR 0140-05088 CABLE POWER, PLATEN 3 CNTRL-MOTOR 0140-05685 HARNESS ASSY MATCH CONTROL HPDCVD 0140-05891.001 HARNESS, SMIF I/F, CASSETTE OUT 0140-06248 HARNESS ASSEMBLY, CENTURA DXZ, RPS/DPA/E 0140-06383 SMIF WIRING CASS IN PLACE 0140-06843 GAS PANEL SPARE I/O #1 UMBILICAL ADAPTOR CH. A/B 0140-06912 GEN RACK (TOP FEED) GFI CB NON POWER 0140-07385 HARNESS ASSY, HV MODULE DIRECT I/O, 200MM 0140-07702 HARNESS ASSY, WAFER SLIPPAGE W/B LLK ON 0140-07977 DC FAN & INTERLOCK 200MM HDPCVD 0140-07988 HARNESS ASSY, SIDE MATCH CONTROL, CH C 0140-08724 HARNESS, E-CHAIN AI/O HEAD, 200MM 0140-09047 INTERCONNECT CABLE, 1 HEAT EXCHANGER 0140-09122 HARNESS ASSY COVER SW INTERLOCK 0140-09159 HARNESS ASSY ROOTS BLOWER JUMPER TO REMOTE 0140-09173 HARNS ASSY,EXT SENSOR C 0140-09174 HARNESS ASSY, ROTATION SENSOR CABLE 0140-09190 HARNESS ASSY 20 SLOT SYS CONTROLLER 0140-09197 MINI CONTROLLER DC POWER CABLE 0140-09223 HARNESS ASSY CVD/TUNG CHAMBER 0140-09229 HARNESS ASSY GAS PANEL COVER SWITCH 0140-09285 HARNESS ASSY TURBO INTERCONNECT 0140-09291 INTERCONNECT CABLE, O HEAT EXCHANGER 0140-09465 HARN ASSY,ASP CHAMBER INTERCONNECT 0140-09484 MINI CNTRL EXP GAS PANEL 0140-09489 HARNESS, CTRL MOD C/D 0140-09505 GATE VALVE CHAMBER HARNESS ASSY 0140-09514 HRNS ASSY GATE VALVE TEMP SWITCHES 0140-09523 HARNESS 50FT PWR LIIFB LIQ INJ 0140-09661 HARNESS ASSY, TC INTERLOCK 0140-09720A WXZ HARNESS 0140-09970 HARNESS ASSY,INTERCONNECT,DXZ,P5000 0140-09981, B HRNS ASSY POWER DUAL DISK DRIVES 0140-09996 HARNESS, PRESSURE TRANDUCER, 1-6 0140-10033 HARNESS, EXHAUST INTERLOCK 0140-10034 HARNESS, PRESSURE TRANSDUCER, 11-13 0140-10035 HARNESS, PRESSURE TRANSDUCER, 7-10 0140-10069 MATCH INTERLOCK HARNESS 0140-10115 HARNESS ASSY CATHODE MAINT.RIGHT,CENTURA 0140-10116 HARNESS ASSY CATHODE MAINT.LEFT,CENTURA 0140-10139,A INTERCONNECT TURBO CONTROL PCB 0140-10155 HARN ASSY, COOLDOWN CHAMBER 0140-10260 HARNESS ASSY, COMMON CHAMBER, RTP 0140-10280 TURBO INTERCONNECT LEYBOLD POLY DPS-A3 0140-10536 HARNESS EXHAST INTERLOCK 0140-10941 HARNESS,DPA CONTROL,CENTURA 0140-11443 HARNESS ASSY PCIIE-SLT 0140-11849 HARNESS ASSY CHAMBER TXZ AND AXZ 0140-12525 HARNESS ASSY SMIF I/F LL DOOR OPEN/CLS 0140-12526 HARNESS ASSY SMIF CASS ROTATE OUT/IN 0140-14737 HARNESS ASSY SHUNT-POWER & FUSES 0140-15034 HARNESS ASSY, EXTEND WATER FLOW SW, WXZ 0140-15198 HARNESS, GFI CB RELAY POWER, GEN RACK 0140-16103 SMIF CABLE, ASYST CASSETTE PRESENT 0140-16104 SMI, CABLE ASYST CASS LOAD/UNLOAD 0140-16105 H/A, SMIF-ASYST DOOR OPEN INTERCONNECT 0140-16106 H/A, SMIF-ASYST DOOR CLOSE EV INTERCONNECT 0140-16110 SMIF, ASYST 24V POWER FOR PCB 0140-16118 H/A, SMIF-ASYST CASSETTE LOAD/UNLOAD 0140-16358 HARNESS ASSY CHAMBER INTERCONNECT EPI 0140-16435 HARNESS ASSY, SMC SINGLE LOOP CHILLER, HOT LOOP 0140-18053 HARNESS ASSY, WATER FLOW INTLK HDP CVD 0140-18058 HARNESS, DUAL HE CONTROL ULTIMA 0140-18063 HARNESS, SOURCE CONDITIONING & INTERLOCKS 0140-18071 OBS HARNESS ASSY, CHAMBER AND FORELINE PRESSURE 0140-18078 HARN ASSY, RF GEN INTLKS, ULTIMA A & B P 0140-18082 HARN ASSY, RF GEN INTLKS, ULTIMA C & D P 0140-18122 HARNESS ASSY, E-CHUCK P.S. AND BIAS MATCH 0140-18129 HARNESS ASSY. SMC HOT LOOP CONTROL 0140-18135 HARNESS ASSY I/O EXPANSION, CHAMBER A&B 0140-18136 HARNESS ASSY I/O EXPANSION, CHAMBER C&D 0140-18137.A HARNESS ASSY, SMC COLD LOOP CONTROL 0140-18140.A HARNESS ASSY, SMC HOT LOOP CONTROL 0140-18144 HARNESS ASSY, SMC COLD LOOP CONTROL 0140-18155-001 HARNESS ASSY. REMOTE SERIPLEX POWER FEED 0140-20014 HARNESS CONVECTRON 2 CONTROLLER. 0140-20042 DC POWER MAIN 24V CONTROLLER 0140-20050 HARNESS 5-PHASE MOTOR CASSETTE 0140-20051 HARNESS 5-PHASE MOTOR BUFFER 0140-20054 HARNESS ASSY, 5 PHASE ( XFER ROBOT OUTPUT) 0140-20055 HARNESS STEPPER 5-PHASE 0140-20056 HARNESS AC 5-PHASE 0140-20072 HARNESS ASSY MAIN GEN RACK EMO 0140-20077 HARNESS BUFFER ROBOT & SENSOR /FLAG 0140-20090 HARNESS ASSY, 5 PHASE ( XFER ROBOT INPUT) 0140-20091 HARNESS 5-PHASE DRIVER BUFFER 0140-20092 HARNESS ASSY, 5 PHASE ( XFER ROBOT INPUT) 0140-20118 ORIENTER LASER CCD HARNESS 0140-20126 HARNESS PVD DRIVER INTERCONNECT 0140-20127 HARNESS PVD DRIVER CONTROL INT 0140-20139 HARNESS ASSY,TURBO ON/OFF CONTROL 0140-20214 HARNESS MAG LAMP DRIVER CONTROL 0140-20215 HARNESS LASER DIODE POWER 0140-20233 HARNESS SHIELD TREAT/TURBO/ CONT 0140-20244 HARNESS EBARA PUMP CONTROL 0140-20248 HARNESS ASSY, LLC WAFER SENSE FOR ENDURA 0140-20249 HARNESS ASSY, LLC WAFER SENSE FOR ENDURA 0140-20253 HARNESS ASSY, LLC A WAFER SENSOR L/R 0140-20254 HARNESS ASSY, LLC B WAFER MAP 0140-20257 HARNESS ASSY, F/A LOADLOCK 0140-20258 HARNESS ASSY., F/A LLA INT 0140-20259 HARNESS ASSY., F/A LLB INT 0140-20283 HARNESS ASSY., EBARA MONOLITH PUMP 0140-20397 HARNESS ASSY TEM+C216P SW INTERCONNECT AMJ TRANSFORMER 0140-20415 CHAMBER HARNESS WIDE BODY NO SHUTTER 0140-20425 HARNESS ASSY, DEGAS-PVD COVER INTLK 0140-20492 HARNESS ASSY CHBR TRAY INTERCONNECT 0140-20494 HARNESS ASSY, LL WAFER SENSOR 0140-20501 HARN ASSY DRVR +24/+5 POWER 0140-20502 HARN ASSY AC 2-PHASE DRIVER 0140-20508 HARNESS ASSY, LID UP-DOWN AT PANEL 0140-20512 CH E DIGIT LA/INTLK 0140-20513 CH E DIGITAL 0140-20517 HARNESS ASSY, EXPANSION BD DC POWER 0140-20524 CH E PNEUMATIC 0140-20537 HARNESS ASSY RF MATCH C&D PC II 0140-20540 HARNESS ASSY CHAMBER 1&2 I/C 0140-20548 HARNESS ORIENTOR POSITION E 0140-20575 HP PVD CENTURA CHAMBER HARNESS 0140-20601 HARNESS ASSY FAN 15V PS 0140-20655 HARNESS ASSY SERIAL/PARALLEL INTCON 0140-20656 HARNESS ASSY DC POWER 2ND SET DISK DR 0140-20688 STORAGE CHAMBER LIFT/COVER 0140-20693 HARNESS ASSY NEW MAIN CONNECT SHUTTER 0140-20709 HARNESS ASSY PRCLN II MATCH INTERLOCK SW 0140-20710 HARNESS ASSY PCII CHBR MATCH INTERLOCK 0140-20781 HARNESS ASSY, CASSETTE OUT SENSOR 0140-20823 OBS CABLE ASSY TRANSFER CH# RESOLVER 0140-20825 CABLE ASSY, RESOLVER TO MF 0140-20835 HARNESS ASSY VHP MAINFRAME TRANSFER CHAMBER 0140-20866 HARNESS ASSY 0140-20882 VHPO XFR LID HARNESS 0140-20944 HARNESS ASSY WAFER SLIP W/B LLK ON ENDURA 0140-21104 HARNESS, SMIF INTERFACE, PCB PWR 0140-21106 SMIF WIRING I/F CASS ROT IN/O 0140-21109 SMIF WIRING I/F DOOR OPEN 0140-21406 HARNESS ASSY, HIGH EFF MATCH / INTLK 0140-21407 2 MHZ RF MATCH/WTR FLOW INTRLK 0140-21408 HARNESS ASSY PVD W/B CH INTERCONN 0140-21413 H/A INTLKWTR BOX/AC BOX/CVR 0140-21413 REV P2 H/A INTLK WTR BOX/AC BOX/CVR 0140-21454 HARNESS ASSY UPS EMO INTERCONNECT SYSTEM AC 0140-21612 HARNESS ASSY GFI CB 1 - POLE UPS 0140-21669 HARNESS ASSY 1 - POLE UPS BYPASS 0140-21751 HARNESS ASSY, CASSETTE PRESENT, 24V POWER 0140-21804A WATER FLOW INTLK 0140-21826 HARNESS ASSY, CHAMBER, TXZ AND AXZ 0140-21828 EX REACTIVE PRECLEAN CHAMBER HARNESS 0140-21836 CVD CHAMBER W/ BSP ON ENDURA 0140-21875 BACKSIDE TRANSDUCER CABLE 0140-21981 SMIF INTERGRATED WB LLKA HARNESS 0140-21982 SMIF INTEGRATED WB LLKB HARNESS 0140-21983 CABLE ASSY 24V KICK PLT TO PCB 0140-21984 HARNESS ASSY CASSETTE IN PLACE 0140-2251 HARNESS ASSY, NITRIDE 550 AC CONDUIT, CH B 0140-23688 HARNESS ASSY USER I/O, ISRM, FLOW, 200MM EZ UPA 0140-23689 HARNESS ASSY ANALOG I/O HD 3-4, 200MM EZ-UPA 0140-23690 HARNESS ASSY DIGITAL I/O HD 3-4, 200MM EZ-UPA 0140-23691 HARNESS ASSY HEAD SWEEP HOME SENSOR, EZ UPA 0140-23693 HARNESS ASSY HEAD ROTATION MOTOR 10 DRIVE, EZ-UPA 0140-23694 HARNESS ASSY WAFER LOSS SENSOR, EZ UPA 0140-23695 HARNESS ASSY HD 1 - 4 RESOLVER CABLE, EZ-UPA 0140-23696 HARNESS ASSY HEAD SWEEP 1 - 4 DRIVER, EZ UPA 0140-24284 HEAD ROTATION MOTOR 4 DRIVE, EZ-UPA 0140-24285 HARNESS ASSY HEAD ROTATION MOTOR 2 DRIVE, EZ-UPA 0140-24286 HARNESS ASSY HEAD ROTATION MOTOR 3 DRIVE, EZ-UPA 0140-25028 HARNESS ASSY EZ-UPS AC EXTENSION 200 MM CMP 0140-28486 HARNESS ASSY, ROTATION MOTOR ASSY 0140-35100 HARNESS ASSY LOAD LOCKS INTERCONNECT (STD MF) 0140-35103 HARNESS ASSY TRSFR CHAMBER SLIT VALVES (STD MF) 0140-35110 HARN ASSY, LID CNTRFNDR WAFR DTCT (STD M) 0140-35144 H/A CENTURA HT SCRB CONT TO CNTRL 0140-35145 CENTURA HT SCRC CONT TO CONTROL 0140-35150 HARNESS ASSY SCR AC CONTROL A 0140-35165 H/A EMO MAINFRAME CENTURA (HT) 0140-35167 H/A DOOR INTLK SWITCHES UPPER MAINFRAME 0140-35168 H/A DOOR SWITCHES BLOWER INTLK 0140-35169 HARNESS ASSY DUAL SEAL/WATER LEAK 0140-35190 HARNESS ASSY FAN SCR 480V CENTURA HT 0140-35240 CABLE ASSY, WXZ CHAMBER 0140-35315 H/A DOOR INTLK SWITCHES, MAINFRAME 0140-35385 HA ASSY,EXTEND WATER FLOW SW,WXZ 0140-35388 HARNESS ASSEMBLY CHAMBER INTERCONNECT 0140-35412 HARNESS,MFCS CHAMBER B 0140-35427 HARNESS ASSY,COMMON CHAMBER,RTP 0140-35429 CHAMBER TRAY INTERCONNECT CABLE 0140-35462 HARN ASSY, COOL DOWN CHAMBER 0140-35671 CENTURA ETCH CHAMBER HARNESS 0140-35712 HARNESS ASSY ETCH 0140-35732 HARNESS ASSY, INTERCONNECT, DXZ, P5000 0140-35733 DXZ CHAMBER INTERCONNECT 0140-35743 HARNESS ASSY, CENTURA SACVD CLH CHAMBER. 0140-35790 HARNESS CHANNEL RIGHT DPS 0140-35791 HARNESS CHANNEL LEFT DPS 0140-35847 HARNESS 5200 CHAMBER, SHO MXP 0140-35854 HARNESS ASSY 0140-35959 HARNESS ASSY, SERVICE/PROCESS MANOMETERS -BARATRON SIGNAL 0140-35964 HARNESS ASSY SEIKO STPH13033C INTERCONNE 0140-36026 H/A CONFIG GAS PANEL LEFT SIDE EXHAUST S 0140-36039 HARNESS ASSY, DC POWER SUPPLY TO INTERCONNECT 0140-36068 HARNESS ASSY CHAMBER INRF 0140-36126 DTLR TEOS INTERLOCK, GPLIS 0140-36130 PLIS HARNESS BUNDLE CHAMBER A 0140-36157 CABLE ASSY, MAGNET DRIVER ADAPTER 0140-36165 HARNESS ASSY CHAMBER EXHAUST 0140-36248 PVD CHAMBER HARNESS 0140-36405 H/A, CHAMBER, STANDARD PLUMBING 0140-36731 H/A BLWR A POWER TO D/R BRKT TOP 0140-36734 H/A AI/O TO DRIVERS, VAR SPD BLWR 0140-36738 H/A DRIVER POWER OUT,VAR. SPEED BLWR. 0140-37691 H/A FLOW - ZONE CONTROL 0140-37698 H/A FLOW - ZONE MAINFRAME AC POWER 0140-37817 HARNESS ASSY, CXZ CHAMBER CLAMP/PRESSURE 0140-37846 PVD CHAMBER HARNESS 0140-38207 HARN, EXT-ETCH COVER INTERLOCK 0140-38233 HARNESS ASSY, INTERCONNECT, DXZ, CENTURA 0140-70037 HARNESS HEAT EXCHANGER 0140-70070 HARNESS ASSY. CCD BOARD TEST LOADLOCK 0140-70093 HARNESS ASSY CENTURA INTERFACE PUMP INTE 0140-70233 HARN, MAINFRAME PRESSURE 0140-70235 H/A SYS ELEC CONTR PWR DIST 0140-70236 H/A SYS ELEC CONTR INTR DIS 0140-70352 HARENSS ASSY, VHP ROBOT TRANSFER RESOLVER TO DRIVER 0140-70353 HARNESS ASSY VHP MAINFRAME TRANSFER CHAMBER 0140-70408 LLA SMIF, MAIN FRAME HARNESS 0140-70409 LLB SMIF, MAIN FRAME HARNESS 0140-70410 H/A SMIF ADAPTED WB LLA INTRCNCT PHASE I 0140-70411 H/A SMIF ADAPTED WB LLB INTRCNCT PHASE I 0140-70412 24V DC POWER SUPPLY TO KICK PANEL 0140-70413 SMIF INTERFACE TO KICK PANEL 0140-70420 XFER CHAMBER VHP ROBOT 0140-70468 HARN ASSY,INTLK,WXZ CH 0140-70524 HARNESS ASSY,VHP RSOLVR,CNTRL TO DRIVER 0140-70525 HARNESS ASSY VHP MOTOR CNTRL TO DRIVER 0140-75036 CENTURA MAINFRAME BULKHEAD
0140-75062 HARNESS ASSY 0140-75070 HARNESS ASSY DRIVER ENCODER HOME SENSORS (STD MF) 0140-75229 SHIELDED CONV CH INT/CYRO
0140-76099 HARNESS OTF CENTERFINDER 0140-76170 H/A-CENTURA SYS ELEC CONTR DIST 0140-76222 HARNESS ASSY, INTERCONNECT CH. W/B 0140-76223 PVD DEGAS CHAMBER HARNESS
0140-76224 HARNESS ASSY, INTERCONNECT CH. 3/4 0140-76260 H/A HT SCRC CONT TO CNTRLR 0140-76262 H/A SCRC 0140-76304 HARNESS, EMC COMP. STD INTFC, PUMP INTEG 0140-76327 HARNESS VHP TRANS CH DD MOTOR END 0140-76351 H/A, POWER DIST., AC BOX, MAIN 0140-76362A CHAMBER HARNESS, CHAMBER E 0140-76370 HARNESS ASSY, INTERCONNECT DC POWER 0140-76377 H/A PRESS SW., FLOW SW., EXHAUST DUCT 0140-76428 H/A SPLIT CONTROL ACP TO BJ 0140-76711, A H/A RIBBON CASS INDEX / ELEV STP EXT 0140-76831 HARNESS ASSY CONT REMOTE GAS AO/AI/DI/DO 0140-76833 HARNESS ASSY, CONT REMOTE GAS AO/AI/DI/DO 0140-76834 HARNESS ASSY, AI MUX CONT REMOTE GAS 0140-76836 HARNESS ASSY, VME CDGE/REMOTE GAS AO3/DI/DO7 0140-76979 VHP ROBOT CONTROL HARNESS
0140-77017 HD ROT, CONT BKHD MNFRM BKHD 0140-77021 HARNESS, X-CAR MAINFRRAME BLKHD 0140-77027 H/A ROBOT, PWR, DRVRS-CONT BULKHD 0140-77037 X-CAR MAINFRAME BKHD-MTRS END CABLE 0140-77102 PL1, POWER CONTROL MOTOR 0140-77103 PL2, POWER CONTROL MOTOR 0140-77104 PL3, POWER CONTROL MOTOR 0140-77145 HD ROT 1 PWR CONTRL-MNFRM BKHD 0140-77146 HD ROT 2 PWR CNTRL-MNFRM BKHD 0140-77147 HD ROT 3 PWR CNTRL-MNFRM BKHD 0140-77148 HD ROT 4 PWR CNTRL-MNFRM BKHD 0140-77219 DUAL SLURRY ANALOG DRIVER-BACKPLANE 0140-77266 CABLE ,HD ROT,CONT BLKHD 0140-77267 PAD COND CTR 0140-77268 HARNESS,PLTN, CONTBLKHD 0140-77269 CABLE,ROBOT Y,Z,T CNTRLBH 0140-77270 CABLE,HD SWP CNTRL BH 0140-77271 CABLE, CNTRL BH - MF BH 0140-77272 CABLE ROBOT X CNTRL BH 0140-77273 PLATEN 1 CNTRL BH 0140-77274 PLATEN 2 CNTRL BH 0140-77275 PLATEN 3 PWR, CNTRL-MNFR 0140-77276 PAD COND CTR 0140-77277 PAD COND CTR 0140-77278 PAD COND CTR 0140-77279 PAD COND1 E,CNTRL-MNFR 0140-77280 PAD COND2 E CNTR-MNFR 0140-77281 PAD COND3 E,CNTRL-MNFR 0140-77282 AO IO HARNESS,CNTRL-MNFR 0140-77283 A1 IO HARNESS,CNTRL-MNFR 0140-77284 D1 IO HARNESS,CNTRL-MNFR 0140-77285 D2 IO HARNESS,CNTRL-MNFR 0140-77286 D3 IO HARNESS,CNTR-MNFR 0140-77287 D4 IO HARNES,CNTRL-MNFR 0140-77288 D5 IO HARNESS,CNTRL-MNFR 0140-77289 HD ROTATION1,CNTR-MNFR 0140-77290 HD ROTATION2 CNTRL-MNFR 0140-77291 HD ROTATION3 CNTRL-MNFR 0140-77292 HD ROTATION4,CNTRL-MNFR 0140-77293 ROBOT ENC CNTRL-MNFR 0140-77295 HARNESS LIGHT TOWER CNTR 0140-77296 HARNESS EMO CNTRL BH 0140-77297 CABLE GROUND 0140-77298 HARNESS SLURRY PUMP CNTR 0140-77300 HEAD SWEEPER SENSOR CABLE 0140-77303 HARNESS COVER SWITCH CONT 0140-77347 HARNESS AC POWER ON-TRACK 0140-77419 LOWER PNEUMATIC AND CABLE/HARNESS ASSY KIT 0140-77430 POWER MEGASONIC 0140-77431 CNTRL BK PLANE D6 TO MAINFRAME BULKHEAD 0140-77433 CBL,RMT STAR/STOP CONT 0140-77440 AC POWER MEGASONIC CONTRLR 0140-77564, A CABLE, FABS EMO 0140-77615 CBL, PORT SERVER-BKHD 0140-77631 C/A HD ROT1-4 MTR DRIVER RESOLVER 0140-77632 C/A HD SWP1-4 MTR DRIVER 0140-77633 C/A HD ROT1 MTR DRIVER 0140-77634 C/A HD ROT2 MTR DRIVER 0140-77635 C/A HD ROT3 MTR DRIVER 0140-77636 C/A HD ROT4 MTR DRIVER 0140-77637 C/A DIGITAL I/O HEAD & USER CONF 0140-77638 C/A ANALOG I/O HEAD & USER CONF. 0140-77640 SIGNAL CABLE-NOVA/MEGASONIC 0140-77654 L.T. CABLE, P82-J81 0140-77747 HARNESS+C595S, ROBOT X POWER CNTRL-MF 0140-78041 H/S SENSON CONTROL. BLKHD 3, SRD 0140-78044 H/A SENSOR CONTROL, BLKHD 2, SCRUBBER 0140-78045 H/A SENSOR-CONTROL, BLKHD 3, SCRUBBER 0140-78065 PORT SERVER 0140-78067 MAINFRAME END PT 0140-78156 CABLE, ANALOG OUTPUT, MEGASONIC PS 0140-78217 H/A DIGITAL ISRM, INTLK CNTRL BKHD-KL1 0150-00001 CABLE AC CORD VME INTERFACE 0150-00107 CABLE ASSEMBLY NULL MODEM RTC,RTP 0150-00253 JENOPTIK ROBOT INTERCONNECT 0150-00294 CABLE ASSY, CORP EXPANDED VME, #6 0150-00303 E/P MODULE MONCHROMATOR INT A 0150-00304 E/P MODULE MONOCHROMATOR INT B 0150-00305 E/P MODULE MONOCHROMATOR INT C 0150-00306 E/P MODULE MONOCHROMATOR INT D 0150-00314 ENDPOINT MODULE P5000 0150-00383 CABLE AND MICRO SWITCH ASSY
0150-00427 LOW FREQUENCY RF CABLE 0150-00482 CABLE,ASSY.TRAY PCB INTERCONNECT MCE 0150-00518 EXHAUST PRESSURE GAS INTERLOCK 0150-00523 CABLE ASSY, 25FT, M/F EMO UMBILICAL 0150-00525 CABLE ASSY, 90 DEG SHELL 25 FT UMBILICAL 0150-00526 CABLE ASSY. 90DEG SHELL, 40FT UMBILICAL 0150-00527 CABLE ASSY. 90DEG SHELL, 60FT UMBILICAL 0150-00528 CABLE ASSY. 90DEG SHELL, 75FT UMBILICAL 0150-00551 HTX INTERCONNECT 0150-00584 CABLE ASSY M/F EMO UMIBLICAL 0150-00603 CABLE ASSY SMP RF MATCH CNTRL, SERIPLEX, C 0150-00604 CABLE ASSY SMP RF MATCH CNTRL, SERIPLEX, C 0150-00634 CABLE ASSY, DT BIAS MATCH CONTROL 0150-00752 C/A K11 UPS MOD 1 0150-00753 C/A K11 UPS MOD 1 0150-00754 C/A K11 UPS MOD 3 0150-00885 C/A FLOW SENSOR B/D/F POS. CHAMBER HX
0150-00886 FLOW SENSOR C/A, B/D/F POS, CHILL FAC, P 0150-00887 FLOW SENSOR C/A,B/D/F POS, CHAMBER CHILL 0150-00916 POWER CONTROL CABLE
0150-00931 CABLE ASSY MF EMO UMBILICAL 0150-00932 CABLE ASSY. MF EMO UMBILICAL 0150-00939 CABLE ASSY, RS232,TEMP. DATA COMM 0150-00947 EMC COMP. C/A MF UMBILICAL #2 0150-00948 CABLE ASSY,SCR DRIVER CONTROL, RTP 0150-00950 C/A SMIF ASYST 72IN LLA/LLB KICKPANEL TO ROBOT 0150-00987 CHAMBER TEMP SENSOR I/0 EXPA 0150-00997 CABLE ASSY, MOD PWR SMOKE/WATER I/O TO M 0150-01027 MOD PWR SMOKE/WATER I/O TO MA-CH 0150-01029 MOD PWR SMOKE/WATER I/O TO MA-CH 0150-01030 MOD DRIVER CONTROL I/0 0150-01031 MOD DRIVER CONTROL I/O 0150-01106 CABLE ASSY EMO INTERCONNECT 0150-01110 MOD PWR FEEDBACK 0150-01112 MOD PWR DRIVER FEEDBACK I/O TO MA-CH 0150-01409 CABLE ASSY RX COAXIAL 400KHZ W/ CLAM 0150-01410 CABLE ASSY RF COAXIAL 400 KHZ W/CLAM 0150-01494 CABLE ASSY, SERIPLEX COMMUNICATION, ULTI 0150-01680 CABLE, POWER I/O DIST, 25FT 0150-01681 CABLE,POWER I/O DIST,60FT 0150-01682 CABLE,POWER I/O DIST, 75FT 0150-01683 CABLE,DI/O 37PIN,F/M,25F 0150-01684 CABLE,DI/O 37PIN,F/M,60F 0150-01685 CABLE ASSEMBLY,DI/O 37PIN,F/M,75FT 0150-01686 CABLE,AI/O 50PIN,F/M,25FT 0150-01687 CABLE,AI/O 50PIN,F/M,60FT 0150-01688 CABLE,AI/O 50PIN,F/M,75FT 0150-01689 CABLE ASSY,25' GAS INTLK ABCD=OTHR 0150-01690 CABLE ASSY,40' GAS INTLK ABCD=OTHR 0150-01691 CABLE ASSY GAS INTERLOCK 0150-01692 CABLE ASSY, GAS INTLK ABCD=OTHR 0150-01756 CABLE ASSY, TEMP CNT PCB TO BLKHD 300MM. 0150-01768 CABLE ASSY, STEPPER DRIVER STATUS INTERC 0150-01769 CABLE ASSY 9 PIN FEM TO 9 PIN FEM, RS232 0150-01770 C/A DC BIAS VOLTAGE DIVIDER 0150-01783 CABLE ASSY, DRIVER CONTROL I/O BLK 0150-01784 CABLE ASSY, CONT I/O SIG TO REMOTE AC 7 0150-01785 CABLE, RF GEN DC PWR INTCON 0150-01902 CABLE, ESC I/F WAFER DETECTION, DISPLAY, MDP 0150-01907 CABLE ASSY,SERIAL COMM,PDO TO PDO TRAY,3 0150-01971 CABLE ASSY, EMC COMP. HEAT EXCHANGER 0150-01972 C/A 0/1 0150-01973 C/A 0/1 0150-01977 MF OPERATOR CONTROL OPT 0150-01978 CABLE ASSY, SYSTEM MONITOR, XTND CONTROL 0150-01979 CABLE ASSY, EMC COMP. PUMP UMBILICAL 0150-01980 EMC COMP PUMP UMBILICAL 0150-01981 CABLE ASSY, RF GEN INTERFACE 0150-01982 CABLE ASSY, RF GEN INTERFACE 0150-02046 CABLE ASSY STEPPER HOME SENSOR 0150-02175 SYSTEMS VIDEO, EMC COMP 0150-02352 CABLE ASSY 0150-02354 C/A 9PIN FEM TO 9PIN FEM, 25FT, RS232 0150-02355 C/A 9PIN FEM TO 9PIN FEM, 60FT, RS232 0150-02359 ECI PCB TO EV MANIFOLD CHAMBER B PRODUCER S 0150-02667 PLATEN 1 MNFRM BKHD 0150-02668 PLATEN 2 MNFRM BKHD 0150-02669 CBL ASSY, PLATEN 3 , CNTRL-MNFRM BLKHD 0150-02961 C/A, O2 ANALYZER RS-232 CMT 0150-03160 CABLE ASSY, SCR PIG TAIL, RTP 0150-03337 DPS THROTTLE VALVE MOTOR 0150-03376 AE RPS CONTROL CABLE CHAMBERS A&B
0150-03435 CABLE ASSY, VHP RESLVR, CNTRL TO MF 0150-03527 C/A PATLITE INTERCONNECT 0150-03551 C/A HTX INTERCONNECT 0150-03654 EXTEN CABLE, TPCC CHAMBER TRAY, TPCC CMF 0150-03999 CABLE, RF GEN, DC POWER 0150-04000 C/A, RF GEN INTERFACE 0150-04017 CABLE ASSY, PLC CONTROL 0150-04018 SOURCE CONDITIONING BOX # 1 0150-04019 RF RACK BREAKOUT 0150-04021 SOURCE CONDITIONING BOX # 2 0150-04022 SOURCE CONDITIONING BOX # 3 0150-04023 CABEL ASSY, RELAY CONTROL 0150-04025 PLC POWER # 1 0150-04026 PLC POWER # 2 0150-04028 PLC POWER # 3 0150-04029 PLC POWER # 4 0150-04031 PLC JUMPER 0150-04155 CABLE ASSY. M/F UMBILICAL EXHAUST 0150-04166 HARNESS REMOTE START/STOP CNTLR MAINFRAME BKHD 0150-04167 HARNESS REMOTE START/STOP CNTLR MAINFRAME BKHD 0150-04366 EXTENSION CABLE TPCC CHAMBER TRAY TPCC REV 2 0150-04367 EXTENSION CABLE TPCC CHAMBER TRAY TPCC REV 003 0150-04473 GAS PANEL # 2 0150-04474 MAINFRAME UMBILICAL # 1 0150-04476 MAINFRAME UMBILICAL # 2 0150-04477 MAINFRAME UMBILICAL # 3 0150-04478 PNEUMATICS UMBILICAL 0150-04479 LOAD LOCK UMBILICAL 0150-04520 PLC CONTROL #1 0150-04521 DC POWER SUPPLY 0150-04642 2-PHASE DRIVER SIGNAL I/F 0150-04751 INTERCONNECT BUFFER ROBOT 0150-04752 15V POWER INTERCONNECT 0150-04754 24V POWER INTERCONNECT 0150-04755 CHAMBER C INTERCONNECT 0150-04757 CHAMBER D INTERCONNECT 0150-04758 ORIENTOR E UMBILICAL 0150-04759 ORIENTOR F UMBILICAL 0150-04761 VHP TRANSFER MOTOR 0150-04762 VHP XFER RESOLVER 0150-04764 OPERATOR PANEL INTERCONNECT 0150-04767 EMO FRONT BEZEL INTERCONNECT 0150-04801 WATER LEAK DETECT MAINFRAME INTERCONNECT 0150-04804 LOADER/ PNUEMATIC 0150-04805 GAS INTERCONNECT 0150-04806 CHAMBER A/B INTERCONNECT 0150-04807 CHAMBER 1 INTERCONNECT 0150-04808 CHAMBER 2 INTERCONNECT 0150-04809 CHAMBER 3 INTERCONNECT 0150-04810 CHAMBER 4 INTERCONNECT 0150-04811 MAINFRAME INTERCONNECT 0150-04812 PNEUMATIC INTERCONNECT 0150-04813 CASSETTE INDEXER INTERCONNECT 0150-04814 CONVECTRON 1 0150-04815 CONVECTRON 2 0150-05120 ENI TOP GENERATOR CONTROL CABLE 0150-05121 ENI SIDE GENERATOR CONTROL CABLE 0150-05122 ENI BIAS GENERATOR CONTROL CABLE 0150-05240 90 DEG SHELL, 40FT UMILICAL 0150-05242 90 DEG SHELL, 75FT UMILICAL 0150-05311 RIBBON CABLE ASSY CHBR PNUE DI/DO FOR TGV 0150-05522 CABLE, CONT BLKHD-MAINF BLKHD, ENC 0150-05523 X-CAR ENC CTRL-MNFRM 0150-05646 AE RPS CONTROL CABLE CHAMBERS A&B 0150-05942 CABLE ASSY POWER PLATEN TC OPTION 0150-06175 CABLE, HF GENERATOR CONTROL, DXZ 0150-07002 C/A FEED-THRU PCB 0150-07243 CABLE ASSY, EMO, REMOTE AC RACK TO OZONATOR, PRODUCER 0150-07360 CABLE ASSY, EMO, OZONATOR TO CHILLER, PRODUCER 0150-07644 CHAMBER UMBILICAL ABCD 0150-07833 PLC POWER #1 W/ JUMPER 0150-08598 ENI TOP GEN CONTROL CABLE 0150-08599 ENI SIDE GENERATOR CONTROLLER 0150-08600 ENI BIAS GEN CONTROL CABLE 0150-09027 HEAT EXCHANGER REMOTE FRAME 0150-09033 MONITOR INTERFACE SYSTEM REMOTE
0150-09053 RIBBON CABLE REMOTE POWER BOX 0150-09054 CABLE ASSY RF MATCH 0150-09057 RF GENERATOR 0150-09069 MFC HELIUM / ETCH 0150-09104 RS232 C LIQ SOURCE CABLE 0150-09106 CABLE REMOTE 0150-09107 ASSY CABLE REM ANALOG 0150-09108 ASSY CABLE REM DIG 0150-09109 DC POWER FOOT 0150-09120 HEAT EXCHANGER 2 NESLAB 0150-09143 DC POWER JUMPER TO REMOTE PC 0150-09144 DI/DO JUMPER TO REMOTE PCB 0150-09145 CABLE ASSY FINAL VALVE N2 FLOW INTERLOCK 0150-09153 ASSY CABLE REMOTE EMO 0150-09154 RF MATCH 0150-09155 REMOTE DIGITAL 0150-09156 DC POWER CABLE 0150-09168 ASSY CABLE FINAL VALVE N2 FLOW INTLK 0150-09183 RIBBON CABLE GAS TO REMOTE 0150-09202 CABLE ASSEMBLY TEOS CONTROL TO PANEL 0150-09241 CABLE ASSY CHAMBER PURGE AFC 0150-09259 C/A MFC 0150-09267 MAG CONTROL
0150-09422 CABLE ASSY, INTERLOCK SYS CONNECTION 0150-09501 EXPANDED AO CABLE 0150-09516 HARNESS ASSY 0150-09537 SCR INTERLOCK, WXZ 0150-09583 CABLE COAXIAL DELTA 0150-09588 REMOTE ANALOG #2 0150-09589 REMOTE DIGITAL #2 0150-09640 VME TO DUAL FREQUENCY INTERCONNECT 0150-09641 REMOTE ANALOG TO DUAL FREQ IN. 0150-09643 DUAL FREQUENCY INTERCONNECT DC 0150-09679 SENSORS INTERCONNECT, H2O VD 0150-09701 DUAL FREQ INT TO PANEL 0150-09707 5FT REMOTE VIDEO 0150-09708 50' REMOTE VIDEO 0150-09709 SET GAS TO REMOTE 0150-09710 CONTROL TO PANEL 0150-09758 MAG GEN INTERCONNECT
0150-09777 CABLE 0150-09808 GATE VALVE POWER CABLE ASSY. 0150-09809 GATE VALVE POWER CABLE ASSY. 0150-09810 GATE VALVE PWR EXTENDER 0150-09811 GATE VALVE VME RIBBON CABLE 0150-09812 GATE VALVE PNUEMATIC CABLE 0150-09884 CABLE, ASSY LID INTERLOCK WXZ 0150-09905 RF GROUND 0150-09918 OZONATOR PCB & 5000 0150-09996 PRESSURE TRANSDUCER HARNESS ASSY 0150-10047 UPC INTERCONNECT 0150-10049 UPC FEEDBACK D- CONNECTOR 0150-10073 MOTOR DRIVE WXZ 0150-10074 ADAPTOR,BARO,9/15 SUB D 0150-10077 PRESSURE SWITCH CABLE 1 WXZ 0150-10078 PRESSURE SWITCH CABLE 2 WXZ 0150-10093 CHMBR. PNEU, DI/O CENTURA 0150-10125A CABLE ASSY, SHORTING, SPARE1, WXZ 0150-10126A CABLE ASSY, SHORTING, SPARE2, WXZ 0150-10176 FLAT 486PC TO RS232 0150-10177 CABLE ASSY FLAT 486PC TO HDD 0150-10178 FLAT 486PC TO FDD 0150-10234 SYSTEM INTERCONNECT 0150-10235 SERIPLEX COMMM TO RF RACK A/B 0150-10328 I/0 POWER DISTR.
0150-10454 LID/COVER INTERLOCK SW,DXZ 0150-10490 OPERATOR PANEL EMC COMP 0150-10491 C/A ROBOT CONTROLLER MLTSLT COOL DOWN CHAMBER
0150-10492 MAINFRAME UMBILICAL #1
0150-10493 MAINFRAME UMBILICAL #2
0150-10495 MAINFRAME UMBILICAL #3
0150-10496 LOADLOCK UMBILICAL
0150-10497 PNEUMATIC UMBILICAL
0150-10500 CHAMBER E UMBILICAL
0150-10501 CHAM. UMBIL A-B-C-D CSI 0150-10504 APC GAS PANEL CNTLR, INTC EMC 0150-10505 EMC, APC, GAS PANEL, COMM 0150-10506 SYSTEM MONITOR, EMC COMP 0150-10519 EMO INTERCONNECT 0150-10549 THERMAL COUPLE SENSOR 0150-10595 ASSY, CABLE, DI/DO, DPA 0150-10598 ASSY, CABLE, COMMUNICATIONS, DPA 0150-10609 CABLE ASSY. POWER DPA 0150-10613 ASSY, CABLE, COAX RF GEN, DPA 0150-10670 CABLE ASSY, CNTRL TO CHILLER, 03 DELIVERY 0150-10754 DPA POWER CENTURA 0150-10896 CABLE ASSY. IGL BOARD POWER 0150-11174 GAS PANEL INTLK JUMPER 300MM RPG 0150-11367 MOTOR ENCODER 0150-11513 OVERTEMP INTLK 0150-11514 RELAY CONTROL # 2 0150-11795 CHAMBER B UPS POWER 0150-12007 DIW XDUCER EXTENSION CMP REF 0150-12066 SEC GENERATOR RACK INTERCONNECT 0150-12509 SMOKE DETECT MAINFRAME INTERCONNECT 0150-12521 STEPPER X-AXIS INTERCONNECT 0150-12522 STEPPER Y-AXIS INTERCONNECT 0150-12523 EMO INTERCONNECT SYSTEM AC/MAINFRAME 0150-12870 MAGNETRON INTERCONNECT, ASP, 87 FT 0150-13048 MOTOR DRIVER INTERFACE PCB CABLE ASSY 0150-13068 VHP TRANS MOTOR CONTROL 0150-13071 VHP TRANS MOTOR CONTRO 0150-13072 VHP TRANSFER CABLE
0150-13073 VHP TRANS MOTOR CONTROL 0150-13074 VHP TRANS RESOLVER CNTR 0150-13078 MATCH/LIFT INTERLOCK ASSY 0150-13079 HEAT EXCHANGER
0150-13081 RF CABLE 0150-13084 GAS PANEL POWER
0150-13086 JUMPER, DPA CONTROL, CENTURA 0150-13088 RESOLVER CABLE
0150-13091 FINAL VALVE INTERLOCK UMBILICAL
0150-13092 FINAL VALVE INTERLOCK UMBILICAL 0150-13114 OZONATOR INTERFACE ASSY 0150-13116 CABLE ASSY 0150-13117 GAS PANEL POWER 0150-13163 C/A ROBOT CONTROL 0150-13165 OPERATOR PANEL INTERCONNECT 0150-13166 SYSTEM MONITOR, XTND CONTROL 0150-13167 50 CONDUCTOR UMBILICAL 0150-13170 CONTROLLER TO MAINFRAME 0150-13299 CHAMBER B ON/OFF SCRB TB1 TO EV B 0150-16006 EMO INTERCONNECT 0150-16007 PUMP UMBILICAL 0150-16101 SMIF-ASYST PCB TO KICK PLATE INTERC 0150-16166 SMIF-ASYST LPT2200 INTERFACE 0150-16167 SMIF-ASYST LPT2200 INTERFACE 0150-16986 EMC COMP., CABLE ASSY, PUMP UMBILICA 0150-16989 EMO INTERCONNECT 0150-16990 RF GENERATOR DC POWER INTCNT 0150-18030 OBS-CHAMBER TEMP SENSOR I/O EXPANSION 0150-18033 SERIPLEX 0150-18035 EMC COMP, PUMP UMBILICAL 0150-18040 CBL ASSY, TOP, ETO RF GEN CONTROL 0150-18041 CBL ASSY, SIDE, ETO RF GEN CONTROL 0150-18042 CBL ASSY, BIAS, ETO RF GEN CONTROL 0150-18053 CABLE ASSY, DC POWER DISTRIBUTION 0150-18097 DC POWER CABLE 0150-18117 CABLE ASSY, DC PS TO SERIPLEX W/ 12V POW 0150-18890 DC SOURCE 0150-18894 DC SOURCE ASSY 0150-19197 CABLE ASSY 15D SUB M/F ADAPTER 0150-20002 RF GEN DC POWER INTERCONNECT
0150-20003 REMOTE DC POWER INTERCONNECT
0150-20004 TURBO CONTROL INTERCONNECT 0150-20007 RF GENERATOR INTERCONNECT 0150-20010 PNEUMATIC ZIF
0150-20011 ZIF, LOADER PNEUMATIC INTERCONNECT 0150-20021 STEPPER Y INTERCONNECT
0150-20022 STEPPER Y INTERCONNECT
0150-20024 ENCODER INTERCONNECT
0150-20025 REMOTE 1 INTERCONNECT 0150-20026 REMOTE 2 INTERCONNECT 0150-20027 OPERATOR PANEL, P26 0150-20028 CASSETTE INDEXER INTERCONNECT
0150-20029 BUFFER ROBOT INTERCONNECT
0150-20030 TRANSFER ROBOT INTERCONNECT
0150-20031 24 V POWER INTERCONNECT
0150-20032 15 V POWER INTERCONNECT
0150-20038 REMOTE AI/O CONTROLLER INTERCONNECT 0150-20050 STEPPER X CONTROLLER INTERCONNECT 0150-20054 REMOTE 2 CONTROLLER INTERCONNECT 0150-20061 SUPPLY CONTROL
0150-20070 NESLAB SYSTEM 3 INTERCONNECT 0150-20074 EMO MAIN AC TO SYSTEM AC
0150-20075 EMO INTERCONNECT
0150-20076 EMO FRONT BEZEL INTERCONNECT 0150-20077 MAIN FRAME PUMP CONTROL 0150-20080 PUMP FRAME DIST 0150-20112 EMO GENERATOR 1/2 INT. 0150-20113 EMO GENERATOR 1/3 INT 0150-20119 BUFFER ROBOT TEST *MSG* 0150-20119 CABLE ASSY, BUFFER ROBOT TEST *MSG* 0150-20158 CRYO COMPRESSOR INTERCONNECT. 0150-20159 CRYO COMPRESSOR INTERCONNECT. 0150-20160 EMO INTERCONNECT
0150-20181 EMO INTERCONN SYS. AC/MAIN FR 0150-20182 CHASSIS GROUND, MDX, 1 FT 0150-20187 REMOTE SYSTEM VIDEO 0150-20192 GAS DI/DO EXTERNAL INTERCONNECT 0150-20197 HARNESS TC PCH
0150-20209 FINAL VALVE EXTERNAL INTL INTERCONNECT 0150-20238 LLA LED PWR
0150-20239 LLB LED PWR 0150-20252 ORIENTER RS232 0150-20262 DEGAS AC 0150-20317 ZIF, CONVECTRON INTERCONNECT 1 0150-20318 ZIF, CONVECTRON INTERCONNECT 2 0150-20319 ZIF, PNEUMATIC INTERCONNECT 0150-20320 ZIF, LOADER PNEUMATIC INTERCONNECT 0150-20321 CHAMBER A/B INTERCONNECT
0150-20322 CHAMBER 1 INTERCONNECT
0150-20323 CHAMBER 2 INTERCONNECT
0150-20324 CHAMBER 3 INTERCONNECT
0150-20325 CHAMBER 4 INTERCONNECT
0150-20326 MAINFRAME INTERCONNECT
0150-20327 24 V POWER INTERCONNECT
0150-20328 15 V POWER INTERCONNECT
0150-20329 CASSETTE INDEXER
0150-20330 BUFFER ROBOT INTERCONNECT
0150-20331 TRANSFER ROBOT INTERCONNECT
0150-20332 RF GENERATOR DC POWER INTERCONNECT 0150-20340 GAS INTERCONNECT
0150-20341 CRYO TEMP INTERCONNECT
0150-20342 ENCODER INTERCONNECT
0150-20343 ORIENTER UMBILICAL
0150-20357 CONTACTOR INTERLOCK 0150-20363 RS232-CRYO CONTROL 0150-20469 COAXIAL 13.56 MHZ 0150-20470 COAXIAL 400 kHz (PER PCII CHAMBER)
0150-20480 ZIF CONVECTRON INTERCONNECT 1
0150-20481 ZIF CONVECTRON INTERCONNECT 2
0150-20482 ZIF PNEUMATIC INTERCONNECT 0150-20483 ZIF LOADER PNEUMATIC INTERCONNECT
0150-20484 GAS INTERCONNECT
0150-20485 CHAMBER A/B INTERCONNECT
0150-20486 CHAMBER 1 INTERCONNECT
0150-20487 CHAMBER 2 INTERCONNECT
0150-20488 CHAMBER 3 INTERCONNECT
0150-20489 CHAMBER 4 INTERCONNECT
0150-20490 MAINFRAME INTERCONNECT
0150-20491 CRYO TEMP INTERCONNECT
0150-20492 ENCODER INTERCONNECT
0150-20493 EMO SYS AC/MAIN FRAME 0150-20494 CASSETTE INDEXER
0150-20495 BUFFER ROBOT INTERCONNECT
0150-20496 TRANSFER ROBOT INTERCONNECT
0150-20497 24 V POWER INTERCONNECT
0150-20498 15 V POWER INTERCONNECT
0150-20500 GEN RACK SUPPLY 0150-20509 LLA WAFER MAP CASS SENSOR
0150-20510 LLB WAFER MAP CASS SENSOR
0150-20521 PRCLN II MATCH INTERLOCK SWITCH ASSY 0150-20537 PUMP CONTROL CH C/D 0150-20538 DC BIAS SHORT MONITOR ASSY 0150-20555 EMO MAIN AC TO SYSTEM AC
0150-20556 EMO MAIN AC TO GEN RACK 0150-20557 NESLAB SYS 3 INTERCONNECT 0150-20558 REMOTE DC POWER INTERCONNECT
0150-20559 REMOTE 1 INTERCONNECT 0150-20560 REMOTE 2 INTERCONNECT 0150-20574 A/B PUMP STD INTF 0150-20575 MONOLITH PUMP STD INTF 0150-20578 EBARA EMO JMPR PLUG (A-SERIES) 0150-20580 2-PHS DRVR OUT MTR 0150-20583 MTR LIFT CH 1 & 2 DIST 0150-20584 LOFT CH 3 4 C & D 0150-20585 PUMP INTFC CH D PC 0150-20599 MTR LID LIFT PWR 0150-20600 BUF XFER MTR LIFT INTCK TB1 0150-20601 LID LIFT MTR CONTROL 0150-20602 BUF XFER LID IN PLACE INTLK 0150-20607 VME CDGE DI/DO 8 SYS EXPANSION 0150-20610 SYS EXP FAIL INVTR DIO
0150-20611 SYS EXP FAIL INVTR SYS BACK 0150-20614 CH E CONVECTOR 0150-20615 CH E HEATER TC AMP 0150-20616 CHE CHAMBER CONVECTRON 0150-20619 SYSTEM EXP CH5/CHE DIO 0150-20628 MAINFRAME PNEUMATICS 0150-20639 2-PHASE DRVR INPUT 0150-20640 2-PHASE DRIVER OUTPUT 0150-20660 CABLE PC II RF MATCH TO CHAMBER 0150-20667 GEN RACK DC PWR INTERCONNECT 0150-20668 GEN RACK DC PWR INTERCONNECT ZIF 0150-20671 TURBO CONTROL INTERCONNECT 0150-20674 GAS PANEL UMBILICAL CH C /CH D 0150-20675 GAS PANEL UMBILICAL CH A / CH B 0150-20708 CHAMBER E ORIENTER UMBILICAL 0150-20716 FINAL VALVE INTLK DI REMOTE GAS BOX ASSY 0150-20801 GEN RACK H2O LEAK DETECT INTERCONNECT 0150-20806 EBARA PUMP CONTROLLER 0150-20809 CABLEBRAIDED RF GROUND 0150-20825 CABLE COAX 13.56MHZ 28' PC2 0150-20843 15 V POWER INTERCONNECT
0150-20844 24 V POWER INTERCONNECT
0150-20845 TRANSFER ROBOT INTERCONNECT
0150-20846 CHAMBER 1 INTERCONNECT
0150-20847 CASSETTE INDEXER
0150-20848 ZIF LOADER PNEUMATIC INTERCONNECT
0150-20849 ZIF PNEUMATIC INTERCONNECT 0150-20850 EMO INTERCONNECT
0150-20852 ENCODER INTERCONNECT
0150-20853 CRYO TEMP INTERCONNECT
0150-20854 MAINFRAME INTERCONNECT
0150-20855 CHAMBER 1 INTERCONNECT
0150-20856 CHAMBER 2 INTERCONNECT
0150-20857 CHAMBER 3 INTERCONNECT
0150-20858 CHAMBER 4 INTERCONNECT
0150-20859 GAS INTERCONNECT
0150-20860 CHAMBER A/B INTERCONNECT
0150-20861 ZIF CONVECTRON INTERCONNECT 1
0150-20862 ZIF CONVECTRON INTERCONNECT 2
0150-20863 RF GENERATOR INTERCONNECT ZIF 0150-20864 RF GEN DC PWR INTERCONNECT 0150-20866 TURBO CONTROL INTERCONNECT 0150-20882 ORIENTER UMBILICAL
0150-20885 GEN RACK H20 LEAK DETECT INTRENT 0150-20890 FDD INTERCONNECT ASSY 0150-20891 HDD INTERCONNECT 0150-20960 REMOTE/SYSTEM VIDEO--10M 0150-20991 MAIN FRAME PUMP CNTRL 0150-20994 2 PHASE DRIVER SIGNAL I/F
0150-21011 REMOTE VIDEO ASSY 0150-21039 SYS EXP 5 E F DIO BULKHEAD 0150-21047 ORIENTER UMBILICAL
0150-21048 EMO INTERCONNECT SYSTEM AC/MA 0150-21049 CHAMBER A/B INTERCONNECT
0150-21050 CHAMBER 1 INTERCONNECT
0150-21051 CHAMBER 2 INTERCONNECT
0150-21052 CHAMBER 3 INTERCONNECT
0150-21053 CHAMBER 4 INTERCONNECT
0150-21054 MAINFRAME INTERCONNECT
0150-21055 GAS INTERCONNECT
0150-21056 CRYO TEMP INTERCONNECT
0150-21057 ENCODER INTERCONNECT
0150-21058 ZIF CONVECTRON INTERCONNECT 1
0150-21059 ZIF CONVECTRON INTERCONNECT 2
0150-21060 ZIF PNEUMATIC INTERCONNECT 0150-21061 ZIF LOADER PNEUMATIC INTERCONNECT
0150-21062 CASSETTE INDEXER
0150-21063 BUFFER ROBOT INTERCONNECT
0150-21064 TRANSFER ROBOT INTERCONNECT
0150-21065 24 V POWER INTERCONNECT
0150-21066 15 V POWER INTERCONNECT
0150-21082 TURBO PUMP INTERCONNECT
0150-21084 EMO INTERCONNECT
0150-21085 EMO INTERCONNECT 0150-21093 REMOTE VIDEO ASSY 0150-21112 EMO INTERCONNECT MAIN AC TO GEN RACK 0150-21113 NESLAB SYS 3 INTERCONNECT 0150-21114 REMOTE POWER DC POWER
0150-21115 REMOTE 1 INTERCONNECT 0150-21116 REMOTE 2 INTERCONNECT 0150-21117 EMO INTC-MAIN AC TO PUMP 0150-21118 M/F PUMP CONTROL INTCNCT 0150-21125 TRANSFER ROBOT INTERCONNECT
0150-21126 24 V POWER INTERCONNECT 0150-21127 15 V POWER INTERCONNECT
0150-21128 BUFFER ROBOT INTERCONNECT
0150-21129 CASSETTE INDEXER
0150-21130 OPER PANEL INTERCONNECT
0150-21131 CONTROL INTERCONNECT 0150-21132 CRYO TEMP INTERCONNECT
0150-21133 CHAMBER D INTERCONNECT
0150-21134 CHAMBER C INTERCONNECT
0150-21135 MAINFRAME INTERCONNECT
0150-21136 CHAMBER 4 INTERCONNECT
0150-21137 CHAMBER 3 INTERCONNECT
0150-21138 CHAMBER 2 INTERCONNECT
0150-21139 CHAMBER 1 INTERCONNECT
0150-21140 CHAMBER A/B INTERCONNECT
0150-21141 GAS INTERCONNECT
0150-21142 ZIF LOADER PNEUMATIC INTERCONNECT
0150-21143 ZIF PNEUMATIC INTERCONNECT 0150-21144 ZIF CONVECTRON INTERCONNECT 2
0150-21145 ZIF CONVECTRON INTERCONNECT 1
0150-21147 ORIENTER UMBILICAL
0150-21148 EMO INTERCONNECT
0150-21171 VHP STEPPER DRIVER I/F
0150-21183 DIRECT DRIVE BOX I/O 0150-21184 TOP TRANSFER ASSY 0150-21220 TRANSFER ROBOT INTERCONNECT
0150-21221 24 V POWER INTERCONNECT
0150-21222 15 V POWER INTERCONNECT
0150-21223 BUFFER ROBOT INTERCONNECT
0150-21224 CASSETTE INDEXER
0150-21225 OPER PANEL INTERCONNECT
0150-21226 ZIF PNEUMATIC INTERCONNECT 0150-21227 CRYO TEMP INTERCONNECT
0150-21228 CHAMBER D INTERCONNECT
0150-21229 CHAMBER C INTERCONNECT
0150-21230 MAINFRAME INTERCONNECT
0150-21231 CHAMBER 4 INTERCONNECT
0150-21232 CHAMBER 3 INTERCONNECT
0150-21233 CHAMBER 2 INTERCONNECT
0150-21234 CHAMBER 1 INTERCONNECT
0150-21235 CHAMBER A/B INTERCONNECT
0150-21236 GAS INTERCONNECT
0150-21237 ZIF LOADER PNEUMATIC INTERCONNECT
0150-21238 ENCODER INTERCONNECT
0150-21239 ZIF CONVECTRON INTERCONNECT 2
0150-21240 ZIF CONVECTRON INTERCONNECT 1
0150-21241 EMO FRONT BEZEL INTCNT 0150-21242 ORIENTER UMBILICAL
0150-21243 EMO INTCNT-SYS AC TO M/F 0150-21246 2 PHASE DRIVER SIGNAL I/F
0150-21249 RIBBON CABLE ASSY 0150-21250 RIBBON CABLE ASSY 0150-21318 CHAMBER C INTERCONNECT
0150-21319 CHAMBER D INTERCONNECT
0150-21320 TRANS CH DRIVER VHP 0150-21333 AFS 1.2M RACK GEN RACK 0150-21337 CONTROLLER INTERCONNECT 0150-21338 GAS INTERCONNECT
0150-21339 CHAMBER A/B INTERCONNECT
0150-21340 CHAMBER 2 INTERCONNECT
0150-21341 CHAMBER 3 INTERCONNECT
0150-21342 CHAMBER 4 INTERCONNECT
0150-21343 MAINFRAME INTERCONNECT
0150-21344 CHAMBER D INTERCONNECT
0150-21345 CRYO TEMP INTERCONNECT
0150-21346 ENCODER INTERCONNECT
0150-21347 ORIENTER UMBILICAL 0150-21348 SEC GENERATOR RACK INTERCONNECT EMC COMP (SEALED) 0150-21351 CONVECTRON 2 ZIF
0150-21352 CONVECTRON 1 ZIF
0150-21354 CBL ENCODER INTRCNT ON SYST CONT
0150-21357 CHAMBER 1 INTERCONNECT 0150-21358 CHAMBER C INTERCONNECT
0150-21359 REMOTE 1
0150-21360 REMOTE 2
0150-21361 NESLAB INTERCONNECT
0150-21362 PUMP FRAME INTERCONNECT
0150-21367 TXZ GAS BOX DC POWER
0150-21372 VHP TRANSFER CH MOTOR
0150-21408 NESLAB H20 FLOW INTRENT
0150-21418 REMOTE POWER DC
0150-21419 RF GEN DC PWR INTCON CEM 96 0150-21420 REM 1 INTCON 75 FT CEM 96 0150-21421 REM 2 INTCON 75 FT CEM 96 0150-21422 PUMP FRAME INTERCONNECT 75 FT 0150-21423 75' NESLAB INTCT CEM 96 0150-21424 TURBO CONTROL INTRENT
0150-21426 REMOTE DC POWER INTERCONNECT 0150-21431 EMO MAIN AC TO SYS AC 0150-21437 NESLAB H2O FLOW INTRENT 0150-21445 SMOKE DETECT MNFRM INTCNT CE 0150-21446 WATER LEAK DETECTOR MAINFRAME INTERCONNECT
0150-21447 GEN RACK H20 LEAK DETECT INTRENT
0150-21474 OPERATOR PANEL INTERCONNECT
0150-21514 PUMP CVD/N2 SW 0150-21537 CHASSIS GROUND 0150-21539 TURBO PUMP TO CONTROLLER 0150-21543 NESLAB SYSTEM 3 INTER. 0150-21545 NESLAB FLOW INTRNET
0150-21556 OPERATOR PANEL INTERCONNECT
0150-21564 XFER MOTOR DRIVE BOX VHP 0150-21565 XFER CH RESOLVER VHP 0150-21624 STATUS LAMP SENSOR 0150-21664 N(M), R/A TO N(M), STR RG217 13.56 MHZ BIAS 0150-21665 N(M), R/A TO N(M), STR RG217 13.56 MHZ BIAS 0150-21706 TXZ G/B TO S/C INTRENT
0150-21764 STEPPER X-AXIS 0150-21765 STEPPER Y
0150-21767 HEAT EXCHANGER CONTROL CABLE 0150-21768 COAX ASSEMBLY 0150-21772 GASBOX TO GASBOX INTERCONNECT 0150-21778 PNEU DIST TO GAS INTLK
0150-21932 SMOKE DETECT MF INTCNT (MF TO SYS AC) 0150-21933 WATER LEAK DETECT MF TO SYS AC
0150-21936 ENDURA INTEGRATED SMIF, LLA 0150-21975 MDX-L MINI PN 0150-22001 ORIENTER UMBILICAL 0150-22002 ORIENTER F INTRENT 0150-22021 PUMP, EDWARDS HARSH SVCE 0150-22163 MAGNET-TARGET GAMMA2 0150-22188 REMOTE TO DC POWER
0150-22189 REMOTE 1
0150-22190 REMOTE 2
0150-22280 ENCODER INTERCONNECT
0150-22288 STEPPER X-AXIS INTCNT 0150-22289 STEPPER Y-AXIS INTCNT 0150-22296 ENDURA SMIF INTERCONNECT 0150-22301 EMO GENERATOR 1/3 0150-22319 EMO INTERCONNECT MAIN AC TO GEN RACK
0150-22320 PUMP FRAME INTERCONNECT
0150-22321 NESLAB H2O FLOW INTRENT
0150-22336 WATER LEAK DETECT MF TO SYS AC 0150-22339 STEPPER X AXIS
0150-22340 STEPPER CHAMBER Y AXIS
0150-22341 CVD/ETCH AXIS INTERCONNECT
0150-22342 CVD/ETCH AXIS INTERCONNECT
0150-22343 STEPPER X-AXIS INTCNT 0150-22344 STEPPER Y-AXIS 0150-22386 CH. I/C PCB TO WAFER DETECT PCB 1 0150-22416 WATER LEAK DETECT MF TO SYS AC
0150-22423 HTHU HEATER AC 0150-22431 RF CABLE B101 13.56 MHZ BIAS 0150-22457 CABLE, DI/O 8 EXPANDED 0150-22550 STATUS LAMP ENDURA TO MNFRM CONTRL 0150-22552 STATUS LAMP TO CONTROLLER 0150-22735 SOURCE RETURN SECOND SUPPLY 0150-22753 ENDURA INTEGRATED ASYST SMIF 0150-22813 SMIF PCB TO KICKPLATE, LLA 0150-22814 SMIF PCB TO KICKPLATE, LLB 0150-22843 MAIN A/C SYSTEM A/C EMO INTRNECT 0150-22844 MAIN A/C SYSTEM A/C EMO INTRENT
0150-22845 MAIN AC/SYS AC EMO INTCO 0150-23698 A/O CAPACITOR - TPI 0150-23699 CHAMBER INTERLOCK 0150-23700 POWER CAPACITOR - TPI 0150-23897 MEGA SPEED POWER JMP 0150-25355 CABLE ASSEMBLY 0150-35002 MONITOR ASSY 0150-35094 TRANSFER ROBOT TEST 0150-35140 HARD DISK POWER 0150-35168 SYSTEM ELECTRONICS BACKPLANE HARNESS 0150-35169 SYSTEM VME BUS HARNESS 0150-35170 SYSTEM CONTROLLER I/O HARNESS 0150-35180 CJ20-SJ20 ASSY 0150-35205 MAINFRAME UMBILICAL CMJ1 0150-35206 MAINFRAME UMBILICAL CMJ2 0150-35209 PNEUMATIC UMBILICAL 0150-35210 HARNESS ASSY CHAMBER A-B- C-D 0150-35211 DOME PNEUMATICS ASSY 0150-35215 STEC MFC SHORT 0150-35222 GAS PANEL POWER 0150-35223 ROBOT DRIVE CABLE
0150-35227 PUMP UMBILICAL
0150-35258 CP11 0150-35286 RIBBON CABLE
0150-35305 GAS PANEL #1 UMBILICAL 0150-35307 GAS PANEL #2 UMBILICAL 0150-35314 GAS PANEL POWER LG
0150-35319 FRONT PANEL STATUS LIGHTS CENTURA HT 0150-35346 CABLE ASSY RS232 OXIDE 400 0150-35355 INTERFACE JUMPER 0150-35394 NESLAB CONTROL CENTURA 0150-35423 CHAMBER DIO POWER DIS 0150-35431 VDS INTERCONNECT
0150-35438 MAINTENANCE MONITOR 0150-35440 PUMP EXHAUST 0150-35445 MAG DRIVER ADAPTER 0150-35447 PC ENDPT CHA/B/C/D INTFC 0150-35483 UPS INTERCONNECT 0150-35484 EMC COMP CABLE ASSY CHBR.UMBIL A-B-C-D 0150-35487 CABLE,ASSY OXIDE RS232 0150-35488 CABLE, ASSEMBLY, MONITOR 0150-35526 DOME PNUEMATICS UMBILICAL 0150-35527 BLOWER UMBILICAL 0150-35539 GAS PANEL POWER 0150-35540 ROBOT CONTROL 0150-35565 GAS PANEL # 1 0150-35566 GAS PANEL # 2 0150-35567 MAINFRAME UMBILICAL #1
0150-35568 MAINFRAME UMBILICAL #2
0150-35569 MAINFRAME UMBILICAL #3
0150-35570 LOADLOCK UMBILICAL
0150-35571 PNEUMATIC UMBILICAL
0150-35572 CHAMBER A, B, C, D 0150-35592 2-PHASE DRIVER, CHAMBER 0150-35614 C/A ROTATION
0150-35614, B C/A ROTATION 0150-35615 EV MANIFOLD # 1 0150-35616 CABLE, EV MANIFOLD #2 0150-35620 2-PHASE DRIVER, OUT MOTOR 0150-35642 M/F EXH UMBILICAL 0150-35739 ZIF RF GEN INTERCONNECT 0150-35740 C/A, EMC COMP., HEAT EXCHANGER CSI 0150-35762 SMIF CONVENIENCE OUTLET 0150-35791 EMO INTERCONNECT 0150-35792 RTP PUMP UMBILICAL 0150-35841 CABLE ASSY,CONTROL SIGNAL INTERCONNEC 0150-35853 SERIPLEX COMM. CH A
0150-35854 SERIPLEX COMM CH B 0150-35855 SERIPLEX COMM CH C 0150-35856 SERIPLEX COMM CH D 0150-35880 ROBOT CONTROL EMC COMP
0150-35961 C/A RECIPE SELECT 0150-35980 DPS THROTTLE VALVE MOTOR
0150-36035 RF MATCH CONTROL DPS
0150-36036 ESC HV INTERFACE DPS 0150-36037 TC INTERFACE
0150-36131 NESLAB CONTROL 0150-36190 RF MATCH CONTROL SERIPLEX DPS
0150-36292 RF GEN CONTROL,DPA,CENTURA 0150-36344 EMC COMP. CABLE ASSY PUMP 0150-36489 INTERLOCK CABLE CABLE DPA INTERLOCK LOOP
0150-36490 CABLE, INTERLOCK LOOP, DPA 0150-36589 CABLE EXT, G-PLIS VALVE HEATER, CH A 0150-36593 HEATER POWER
0150-36701 CABLE, GPLIS, LFC, CH D 0150-36702 MFC CH A GPLIS
0150-36818 DPA FAN 0150-36819 C/A W/ SW OVERTEMP, 300 F SETPOINT 0150-36897 RF GEN CONTROL DPA 0150-36898 CABLE, JUMPER, DPA CONTROL, CENTURA 0150-36949 LIMIT SWITCH-A 0150-36950 CABLE ASSY
0150-36987 CABLE 0150-37036 EMC COMP.,CBL ASSY,CHAMBER E ORIENT,UMB 0150-37208 SERIAL COMMUNICATION, 5200 0150-37212 EMC COMP., HEAT EXCHANGER CS 0150-37213 EMC COMP., NESLAB CONTROL CSI 0150-37225 CABLE,5-PHASE,AC POWER 0150-37232 AI/O UMBILICAL, VAR SPD BLWR 0150-37250A MOTOR DRIVER INTERFACE PCB CABLE
0150-38444 CHAMBER ETHERNET INTERCONNECT 300 MM DPS 0150-38461 CABLE, ASSY, 5-PHASE DRIVER INPUT 0150-38491 C/A RF GENERATOR ANALOG I/O, 5200 IPS, 5 0150-38493 C/A RF GENERATOR DIGITAL I/O, 5200 IPS, 1 0150-38494 C/A RF GENERATOR ANALOG I/O, 5200 IPS, 1 0150-38496 C/A RF GENERATOR DIGITAL I/O, 5200 IPS 0150-38560 CABLE ASSY, RS232 OZONE DELIVERY, PRODUCER 0150-38616 CABLE ASSY EMO/INTLK INTERCONN 20FT 0150-38678 JUMPER 0150-38679 MANOMETER ADAPTER XFER CH 0150-38815 RS-232 LAMP FAILURE DTCTR, X, RT 0150-38816 RS-232,LAMP FAILURE DTCTR 0150-38853 MAINFRAME EMO CABLE 0150-38855 MAINFRAME EMO UMBILICAL 0150-38912 CABLE ASSY TEPO DTLR TO SYSTEM 0150-38982 MW INLK/ASTEX, MANUAL TUNE HARNESS 0150-39002 CABLE POWER I/O DIST 40FT 0150-39003 CABLE, DI/O 37P, F/M, 40F 0150-39004 CABLE, AI/O 50P, F/M, 40F 0150-39041 AE RF GENERATOR ADAPTER, 200 MM 0150-39056 CHAMBER GAS PANEL INTERLOCK
0150-39308 5-PHASE WITH MOTOR BREAK,DRIV HARNESS 0150-70013 ENCODER ROBOT EXTENSION 0150-70017 ENCODER FLAT FLEX
0150-70018 ENCODER FLAT FLEX
0150-70038 RF ASSEMBLY RG217
0150-70137 SYSTEM REMOTE MONITOR INTERFACE
0150-70163 STATUS LAMP FAULT/UNLOAD/PRO 0150-70190 200/800VAC EXHAUST FAN ASSY 0150-75013 EMC COMP, CABLE PROC INTFC, PUMP INTEGRATION 0150-75018 COAX RG-217/U 103 FT N(M)/N(M) 0150-75034 SYSTEM VIDEO 0150-75040 EMC COMP, CABLE LLC INTFC, PUMP INTEG 0150-75041 EMC COMP, CABLE PROC INTFC, PUMP INTEG 0150-75048 CABLE ASSY, COAXIAL 13.56 MHZ 0150-75068 MOTOR ENCODER 0150-75073 POWER PHASE ANGLE CONTROLLER TO CHAMBER TRAY 0150-75125 ENCODER INTERCONNECT
0150-75149 DC POWER/INTERLOCK. 0150-75150 ORIENTER UMBILICAL CH F 0150-75151 ORIENTER UMBIICAL 0150-75152 ORIENTER UMBILICAL CH F 0150-75153 ORIENTER UMBILICAL CH E 0150-75154 WATER LEAK DETECT MF TO SYS AC 0150-75194 CHMBR, PNEU, DI/O CENTURA UL 0150-75197 CENTURA SCSI/MSM INTERCONNECT 0150-75204 EMC COMP,CABLE ASSY,CHAM UMBIL, A,B,C,D 0150-75205 EMC COMP,CABLE ASSY CHAM UMBIL,A,B,C,D 0150-75206 CHAMBER ASSY 0150-75212 EMC COMPL,LOW FREQ,RF GEN 0150-75213 CABLE ASSY MFC ADAPTER WITH EMI FILTER D 0150-75214 C/A COMMUNICATION, SERIPLEX, ULTIMA 0150-76007 TC A ASSEMBLY 0150-76014 N2 PURGE MFC PIGTAIL
0150-76045 ENCODER CABLE
0150-76066 REMOTE SYSTEM VIDEO 0150-76116 ROBOT CALIBRATION 0150-76156 INSERTION FLOW SENSOR
0150-76165 HEAT EXCHANGER 0150-76166 EMC COMP., ASSY CABLE REMOTE ANALOG 0150-76167 EMC COMP., ASSY CABLE REMOTE DIGITAL 0150-76168 DC POWER FOOT 0150-76169 FINAL VALVE N2 FLOW 0150-76172 HEAT EXCHANGER CABLE 0150-76173 NESLAB CONTROL 0150-76174 RF GENERATOR ZIF 0150-76175 OPER PANEL INTERCONNECT 0150-76176 CHAMBER E UMBILICAL 0150-76177 GAS PANEL UMBILICAL CABLE 0150-76178 GAS PANEL CONTROLLER 0150-76179 MAINFRAME HARNESS ASSY 0150-76180 MAINFRAME HARNESS ASSY 0150-76181 MAINFRAME HARNESS ASSY 0150-76182 LOADLOCK UMBILICAL 0150-76183 PNEUMATIC UMBILICAL 0150-76184 EMC COMP CABLE ASSY CHBR.UMBIL A-B-C-D 0150-76185 MAIN POWER CABLE 0150-76186 C/A CENTURA PUMP INTERCONNECT 0150-76190 EMC COMP, SYSTEMS VIDEO 12 0150-76192 EMC COMP., ASSY CABLE REMOTE 0150-76198 CABLE SYSTEM VIDEO 0150-76199 TURBO CONTROL INTERCONNECT 0150-76204 GAS PANEL #1 UMBILICAL 0150-76205 GAS PANEL # 2 UMBILICAL 0150-76206 CHAMBER UMBILICAL 0150-76207 MAINFRAME UMBILICAL 0150-76208 MAINFRAME UMBILICAL 0150-76209 MAINFRAME UMBILICAL 0150-76210 LOADLOCK UMBILICAL 0150-76211 PNEUMATICS UMBILICAL 0150-76212 ROBOT CONTROL 0150-76213 SYSTEM MONITOR EXTENSION 0150-76217 OPERATOR CONTROL I/O POWER BOARD 0150-76234 PANEL TO REMOTE MA 0150-76237 MOD POWER DRIVER FEEDBACK I/O TO MA-CH 0150-76238 VHP TRANSFER CH MOTOR 0150-76247 CONTROLLER I/O SIG. TO REMOTE AC 0150-76288 DC SOURCE - MDL 0150-76304 PUMP CABLE 0150-76315 COAXIAL 13.56MHz 0150-76316 COAXIAL 13.56MHz 0150-76318 RF CABLE 0150-76322 COAX COUNTERMATCH DXZ 0150-76419.A BTI 41/96 BTI 41/96 FLOW SENSOR MAINFRAME UMBILICAL 0150-76419.A BTI 42/96 BTI 42/96 FLOW SENSOR MAINFRAME UMBILICAL 0150-76428 ANALOG SYNC EXT FASTER WAFER MAPPING 0150-76455 FLOW SENSOR UMBILICAL B, D, F 0150-76458 SUPER E RF CABLE 0150-76461 RF COAXIAL CONNECTOR 0150-76500A FLOW MONITOR CABLE HARNESS ASSY 0150-76501B CENTURA FLOW MONITOR PIGTAIL 0150-76513 MAINFRAME UMBILICAL #2 0150-76656 CENTURA SMIF LLA ASYST 0150-76666 CHAMBER POWER 0150-76667 GAS PANEL UMBILICAL #1 0150-76668 GAS PANEL UMBILICAL #2 0150-76682 LOADLOCK UMBILICAL 0150-76697 GAS PANEL UMBILICAL #1 0150-76698 GAS PANEL UMBILICAL #2 0150-76717 GAS PANEL UMBILICAL # 1 0150-76718 GAS PANEL UMBILICAL #2 0150-76735 ROBOT POWER CEN 2 0150-76739 15 COND. UMBILICAL/CHAMBER POWER 0150-76740 UMBILCAL 2 0150-76741 GAS PANEL I/O 0150-76758 ROBOT POWER CEN 2 0150-76759 GAS PANEL POWER CABLE 0150-76760 OPER PANEL INTERCONNECT 0150-76761 MONITOR CABLE 0150-76767 ROBOT POWER CEN 2 0150-76819 HARNESS MFC CHAMBER C 0150-76821 HTESC STANDARD/WIDEBODY W/C CHAMBERS 0150-76822 AI MUX 3 REMOTE GAS INTERCONNECT 0150-76850 RF GEN DC PWR INTCNT 0150-76863 C/A SMIF INTRLOCK PCB TO KICKPANEL ASYST LLA 0150-76864 C/A SMIF INTRLOCK PCB TO KICKPANEL ASYST LLB 0150-76865 C/A SMIF INTRLOCK PCB TO KICKPANEL ASYST LLA 0150-76866 C/A SMIF INTRLOCK PCB TO KICKPANEL ASYST LLB 0150-76867 C/A SMIF ASYST LLA/LLB KICKPANEL 0150-76868 15 COND, UMBILICAL/CHAMBER A POWER 0150-76869 CENTURA CONTOLLER MAINFRAME 0150-76870 50 COND UMBILICAL/CHAMBER POWER 0150-76871 CHAMBER UMBILICAL 0150-76873 CABLE ASSY, 50 COND UMBILICAL EMC 0150-76875 CENTURA SMIF LLA INTERCONNECT 0150-76876 CENTURA SMIF LLB INTERCONNECT 0150-76962 ORIENTER F UMBILICAL 0150-76963 ORIENTER E UMBILICAL 0150-76991 ROBOT CNTLR MLTST, CLDWN CHBR 0150-76992 PNEUMATIC UMBILICAL 0150-76994 VHP TRANSFER CH MOTOR 0150-76995 VHP TRANSFER RESOLVER 0150-77039 POWER PLATEN CABLE 0150-77040 HD ROT CNTRL 0150-77041 CABLE ASSY, DIGITAL I/OBP 0150-77042 CABLE ASSY, ANALOG I/O BP 0150-77043 PAD COND CTR 0150-77044 DRVS ENCODER 0150-77045 PAD COND CNTR 0150-77070 NULL MODEM CABLE 0150-77097 SECS/GEM EXTENSION 0150-77120 PLATEN 1 MOTOR - CONTROL BULKHEAD 0150-77121 PLATEN 2 MOTOR- CONTROL BULKHEAD 0150-77122 PLATEN 3 MOTOR- CONTROL BULKHEAD 0150-77126 MAINFRAME BULKHEAD D1J2- CONTROL BACKPLANE D1P1 0150-77127 CONTROL BACKPLANE D2P1 - MAINFRAME BULKHEAD 0150-77128 CONTROL BACKPLANE BD D3P1- MAINFRAME BULKHEAD D3J2 0150-77129 CONTROL BACKPLANE BD D4P1 - MAINFRAME BULKHEAD D4J2 0150-77130 CONTROL BACKPLANE BD D5P1- MAINFRAME BULKHEAD D5J2 0150-77132 CONTROL BACKPLANE BDAOP1- MAINFRAME BULKHEAD AOJ2 0150-77133 CONTROL BACKPLANE BDAOP1- MAINFRAME BULKHEAD AOJ2 0150-77137 CONTROLLER ADAPTER P1AP- MAINFRAME ADAPTER P39AS 0150-77142 HEAD ROTATION- CONTROL AND MAINFRAME 0150-77143 PLATEN ENCODER 0150-77144 CAROUSEL 0150-77145 PAD COND 0150-77147 CONTROLLER ADAPTER P19AP - MAINFRAME ADAPTER P48AS 0150-77150 UMBILICAL MAINFRAME BULKHEAD ROBOT 0150-77152 UMBILICAL CONTROL BULKHEAD 0150-77153 UMBILCAL 0150-77154 UMBILICAL MAINFRAME BULKHEAD 0150-77155 MAINFRAME CONTROLLER 0150-77156 PLATFORM CONTROLLER BULKHEAD 0150-77166 CABLE ASSY 0150-77167 CABLE ASSY 0150-77168 CABLE ASSY 0150-77169 CONTROL MAINFRAME BULKHEAD 0150-77170 CONTROL MAINFRAME BULKHEAD 0150-77177 CBL ASSY LIGHT TOWER UMBIL 0150-77178 CBL ASSY EMO UMBIL 0150-77180 PLATEN CNTRL MNFRM BKHD ASSY 0150-77183 CABLE ASSY GROUND UMBIL 0150-77246 HD ROT 1 0150-77247 HD ROT 2 0150-77248 HD ROT 3 0150-77249 HD ROT 4 0150-77264 PAD COND 1 0150-77265 PAD COND 2 0150-77266 PAD COND 3 0150-77282 C/A ADVANCED UPS 0150-77288 CABLE ASSY REMOTE START/STOP CONT/MF BULKHEAD 0150-77354 C/A POWER, FLAT PANEL CNTRL MF INT. 0150-77355 DC POWER SUPPLY PANEL MAINFRAME 0150-77356 PLATEN ENCODER, CNTRL-MNFRM BULKHD 0150-97052 SCR LAMP DRIVER CONTROL 0150-97061 CABLE ASSY.,SCR DRIVER INTERLOCK,ACAP 0150-97112 CABLE ASSY,VHP RESLVR,CNTRL TO MF 0150-97113 CABLE ASSY,VHP MOTOR,CNTRL TO MF 0150-97114 CABLE ASSY,VHP RESLVR,CNTRL TO MF 0150-97115 VHP MOTOR, CNTRL TO MF 0150-97116 CABLE ASSY,VHP RESLVR,CNTRL TO MF 0150-97117 CABLE ASSY,VHP MOTOR,CNTRL TO MF 0150-97118 CABLE ASSY,VHP RESLVR,CNTRL TO MF 0150-97119 CABLE ASSY,VHP MOTOR,CNTRL TO MF 0180-02352 HARNESS ASSY 0190-00694 HARNESS ETO WAVEGUIDE INTLK 0190-05928 C(M) STR TO C(M) STR WITH RG217 0190-05929 C(M) STR TO C(M) STR WITH RG217 0190-09267 MAGNETRON CONTROL 0190-18120 RF ETO SOURCE SIDE ULTIMA HDP-CVD 0190-18121 RF ETO SOURCE TOP ULTIMA HDP-CVD 0190-18122 RF ETO BIAS ULTIMA HDP-CVD 0190-18189 CABLE ASSY, 7 CONDUCTOR ULTIMA HDP 0190-18190 CABLE ASSY,15 CONDUCTOR ULTIMA 0190-18333 HI VOLTAGE 4 PIN ULTIMA 0190-32610 DC POWER T CABLE 0190-34522 ON SCREEN DISPLAY XDCR ASSY 02-02-011-07 SIGNAL CABLE ASSY 0224-00954 MFC CARD EDGE TO 9 PIN D-CON 0226-30364 HARNESS ASSY CONTACTOR EDWARD 0226-31322 RS-232 HYUNDAI 0226-31324 CABLE +5VDC HYUNDAI 0226-31325 HARNESS +24VDC HYUNDAI 0226-40416 EDGE CARD TO 9 PIN D-CON HARNESS ASSY 0226-48451, A HARNESS STANDARD INTERFACE PUMP 0226-98646 ROBOT CNTLR MSCD CH 0226-98647 MAINFRAME UMBILICAL #1 0226-98648 MAINFRAME UMBILICAL #2 0226-98649 MAINFRAME UMBILICAL #3 0226-98650 LOAD LOCK UMBILICAL 0226-98651 PNEUMATIC UMBILICAL 0226-98654 CHAMBER UMBILICAL A-B-C-D 03-00034-00/B NOVELLUS MULTIBUS POWER BOARD TO TERMINAL PANEL C 03-00057-00 LLC DOOR SENSOR 03-00063-00 SPINDLE SENSOR ASSY 03-00063-00 SPINDLE SENSOR ASSY 03-00157-03 Novellus Interface Assembly CA 167 03-00212-03 LIQUID SUPPLY LFC "C" TO CM, 10 FT 03-00267-XX NOVELLUS CABLE CA99 ASSY 03-00274-00 NOVELLUS CABLE, CASSETTE DOOR CA282 03-00313-01 NOVELLUS CABLE ASSY CA102-1 RF COAXIAL CABLE 03-00313-03 RF COAXIAL CABLE 03-032579-02 NOVELLUS CABLE ASSY CA310 03-033871-02 DUAL RF CONTROL 03-034704-01 SSD INTERFACE, DLCM-S HARNESS 03-10193-01 EMO CONTROL 03-10197-01 RS485 COMMUNICATION 03-10209-00 CVD PUMP INTERFACE 03-10328-00 END OF LINE JUMPER 03-10361-01 N2 FLOW INTLK 03-10655-02 LFC A (2) CABLE 03-10735-03 EMO AND ENABLE 03-283739-00 LF COAXIAL CABLE, SEQUEL 03-364705-00/A CABLE ASSY USING NORTHERN TECHNOLOGIES COMPONENTS 060-24000-00 CABLE OPERATOR MONITOR 0600-1002-P15 RGA RS485 0600-1003-P1 Y CABLE RGA 0620-00065 CABLE BEARING 10M LEYBOLD MAG DRIVE 2000. 0620-00066 CABLE DRIVE 10M LEYBOLD MAG DRIVE 2000 0620-01079 CONTROLLER ONBOARD 0620-01082 CABLE ASSY 0620-01207 LOW PASS FILTER 0620-01218 CONTROLLER ONBOARD 0620-01285 3M PUMP TO CONTROLLER SEIKO SEI 0620-01758 BEARING TURBO CABLE 20M LEYBOLD MAG DRIVE 2000 0620-01759 DRIVE TURBO CABLE 20M LEYBOLD MAG DRIVE 2000 0620-02263 CABLE POWER 208V 3COND 6 FT TURBO 0620-02271 CONTROLLER ONBOARD 0620-02308 RS-232 50FT DB9-M/M EMI/RFI HOOD 0620-02336 24AWG 9COND SMARTMATCH DETECT 0620-02382 HX 150 CHX INTERCONNECT CABLE 0620-02383 RS-232 DB9-M/M EMI/RFI H 0620-02384 HX 150 CHX INTERCONNECT CABLE 0620-02729 PS/2 BLKHD-F / PLUG-F 0620-02868 COAX RG-217/U 79FT N(M)/N(M) 0970-00003 UWAVE KIT DISABLE ULTIMA PLUS 1154 EXT. CABLE 1155 EXT. CABLE 1341054A MASTER AND SLAVE CABLE 1346173A GENERATOR COMM CABLE ADAPTER 14-8872-212 H/A PIA RIBBON CABLE 1 14-8875-215 SAFETY BOARD - TOP ASSY 14-8875-223 TWISTED RIBBON, FLOPPY ASSY 146-23000-01 530 PC TO ANALOG FILTER BOARD 146-23000-02 531 PC TO ANALOG FILTER BOARD 146-23000-03 532 PC TO ANALOG FILTER BOARD 146-23000-04 533 PC TO ANALOG FILTER BOARD 147-20000-01 HEATER RESET 771 BACK 147-20000-02 HEATER RESET 771 SIDE 148-21000-00 133 AC BOX TO RF GEN 148-21000-01 133 AC BOX TO RF GEN 148-21000-02 133 AC BOX TO RF GEN 148-21000-03 133 AC BOX TO RF GEN 150-21000-01 641 GAS BOX IB TO MFC 1 150-21000-02 642 GAS BOX IB TO MFC 2 150-21000-03 643 GAS BOX IB TO MFC 3 150-21000-04 644 GAS BOX IB TO MFC 3 180-21000-00 99 ROBOT INTERFACE TO DVR POWER 180-22000-00 CABLE 490 180-30000-00 ROBOT INTERFACE DRIVER 181-21000-01 644 GAS BOX IB TO MFC 4 181-30000-00 #311, SHTL PIN CASS P16 182-20000-00 CABLE ASSY 182-23000-01 CABLE 32 182-23000-02 CABLE 33 182-25000-00 REV1 CABLE ASSY 182-27000-01 CABLE 38 182-27000-02 CABLE ASSY 42 182-27001-00 RF MATCH INTRLK 182-28000-01 CABLE ASSY 39 TO SHUTTLE MANOLETER 182-28000-02 CABLE ASSY 40 182-28000-03 CABLE ASSY 41 182-30000-01 CABLE 43 182-30000-02 CABLE 44 182-30000-03 CABLE 45 182-31000-00 CABLE 46 182-32000-00 CABLE 47 182-33000-00 CABLE 48 182-36000-00 CABLE ASSY 182-36000-01 CABLE 52 RF GEN A BACK 182-36000-02 CABLE 53 RF GEN B BACK 182-36000-03 CABLE 54 RF GEN A SIDE 182-36000-04 CABLE 55 RF GEN B SIDE 182-36000-05 CABLE 52 RF GEN A BACK 182-36000-06 CABLE 53 RF GEN B BACK 182-36000-07 CABLE 54 RF GEN A SIDE 182-36000-08 CABLE 55 RF GEN B SIDE 182-36000-09 CABLE 52 RF GEN A BACK 182-36000-10 CABLE 53 RF GEN B BACK 182-36000-11 CABLE 54 RF GEN A SIDE 182-36000-12 CABLE 55 RF GEN B SIDE 182-36000-13 CABLE 52 RF GEN A BACK 182-36000-14 CABLE 53 RF GEN B BACK 182-36000-15 CABLE 54 RF GEN A SIDE 182-36000-16 CABLE 55 RF GEN B SIDE 182-36000-17 CABLE 2 RF GEN A BACK 182-36000-18 CABLE 4 RF GEN A SIDE 182-39000-01 CABLE ASSY 59 182-39000-02 CABLE ASSY 60 182-41000-01 CABLE ASSY 65 182-41000-02 CABLE ASSY 67 182-41000-03 CABLE ASSY 68 182-41000-04 CABLE ASSY 69 182-41000-05 CABLE ASSY 71 182-42000-01 CABLE ASSY 64 CC 182-42000-05 CABLE ASSY 68 SC 182-42000-06 CABLE ASSY 182-43000-00 CABLE ASSY 72 182-46000-00 CABLE ASSY 75 182-47000-00 CABLE ASSY 76 182-48000-00 CABLE ASSY 77 182-49000-00 CABLE ASSY 40 182-50000-00 CABLE ASSY 10 182-51000-00 HARNESS 182-52000-00 HARNESS 182-53000-00 HARNESS 182-54000-01 HARNESS 182-58000-00 CABLE ASSY 83 182-59000-00 DC SUPPLY CABLE ASSY 84 182-63000-00 CABLE ASSY 182-64000-00 MATTSON RIBBON CABLE 182-65000-01 CABLE ASSY 302 182-65000-02 CABLE ASSY 304 182-74000-00 CABLE ASSY 97 RF COAX 182-74000-01 CABLE ASSY 97 RF COAX 182-74000-02 CABLEASSY 97 RF COAX 182-74000-03 CABLE ASSY 97 RF COAX 182-75000-00 CABLE ASSY 30 182-76000-00 CABLE ASSY 37 182-85000-00 CABLE ASSY 88 182-87000-01 CABLE ASSY 840-01 ICP MAIN PLASMA 182-87000-02 CABLE ASSY 840-02 ICP LEFT SIDE CHAMBER PLASMA 182-87000-03 CABLE ASSY 840-03 ICP RIGHT SIDE CHAMBER PLASMA 182-87000-04 CABLE ASSY 840-04 ICP LEFT REAR CHAMBER PLASMA 182-87000-05 CABLE ASSY 840-05 RIGHT REAR CHAMBER PLASMA 182-88000-00 PIB TO ICP PLASMA SENSE ADAPTER 1D93-K93830 REMOTE FPD/VGA 1D93-K93840 REMOTE TOUCH KEY 2-39-55476 DUPLEX HARNESS 2-39-57172 TRIPLEX HARNESS 2001384 ROBOT CABLE 2002473 ELECTRODE HARNESS 384T SYS. INTERFACE CABLE 2002979-2 D/C ARM CABLE 2003598 WAFER ARM SENSOR 2004304 VIDEO CRT 2019118-001 CABLE ASSY SET 21-8875-007 DC MOTOR BACK PLANE #1 21-8875-009 STEPPER MOTOR ENCLOSURE CABLE 21-8875-039-XXX CABLE, SMIF, LPT 21-8882-004 CABLE, SPIN MOTOR, INTERLOCK, CE96 249288-001 TUBING PLASTIC SPIRAL WRAP 263-00518-00 JA37 ROBOT INTERFACE 263-00519-00 J900 ROBOT INTERFACE 263-00520-00 CABLE ASSY 263-00521-00 CABLE ASSY 263-00528-00 CABLE ASSY 263-00529-00 CABLE ASSY 263-00610-00 WIRE MAP 263-00624-01 WFR MAP 263-00624-02 WFR MAP 263-00624-03 WFR MAP LEFT 263-00624-04 WFR MAP RIGHT 263-01552-05 CABLE ASSY INTLK, PIB 263-01553-00 RIBBON CABLE 263-01656-01 CABLE ASSY 85 LIGHT TOWER PIB 263-02138-03 PUMP STATUS 263-03039-00 CABLE ADAPTER PIB TO ACX AUX 263-03217-00 SECONDARY INTF BD TO SMIF INTF P2 263-03218-01 SMIF ROBOT PANEL LEFT 263-03218-02 SMIF ROBOT PANEL RIGHT 263-03219-00 SMIF INTF TO ASPEN PANEL 263-04241-00 AGV SMIF 263-06346-01 POWER CABLE 263-08211-05 CABLE ASPEN TO REMOTE BOX EMO 263-08767-00 HOME SENSOR CABLE 263-14605-00 EMO CABLE 263-14608-00 CABLE ASSY UHP CONTROL BOX EMO-PCB 263-21000-03 AC BOX TO RF GENERATOR 263-73000-00 CABLE ASSY 82 2810-739769 PLC160 TO RACK 0 340-120-10281 PLATEN MOTOR POWER CABLE 340-120-10282 HD ROT CONTROLLER 340-120-10283 DIGITAL I/OBP 340-120-10284 ANALOG I/OBP 340-120-10285 PAD COND CONTROLLER 340-120-10286 DRVS ENCODER 340-120-10287 PAD COND CONTROLLER 340-120-10288 MNFRM BLKHD ENOPT TO PORT SERVER 3620-01612 C/A STP 301 PUMP TO CONTROLLER 3870-00221 25 PIN 1 METER CABLE 513-04853-OC CABLE ASSY 516-038-000-301 EDAC RACK AND PANEL CONNECTORS 52-504076-001 CABLE ASSY CHAMBER A 603230-01 TEMP A/D FILTERING CABLE 604197-01 HARNESS ASSY WTU WAFER ALIGN EMITTER 604198-01 HARNESS ASSY WTU WAFER ALIGN SIGNAL 604916-01 HARNESS ASSY WTU WAFER ALIGN RECEIVER 7100-4100-01 EXT POWER FLOPPY 811-115-00 CABLE ASSY 851216-01 CABLE ASSY 853-004055 TCS INTERFACE 853-017817 CABLE ASSY, EMO AC CONT BOX 853-017818 CABLE EMO PUMP CART 853-034254-050 TCU INTERFACE 853-090535 CABLE ASSY 853-370176 PUMP INTERFACE 853-370797 L030 PUMP CABLE 853-491062 ASSEMBLY CABLE EMO PM EXT 853-491132 PUMP EMO LL 853-495486 PM PUMP EMO 853-495580 TCS EMO 853-495596 PM PUMP INTERFACE 85912 CONNECTING LINE NT340MA 85913 CONNECTING LINE NT30MA BEARING 9063-1036 RG213 N MALE CABLE 93-117-006 COAXIAL RG214 N-UHF CONNECTORS 951654 POWER 100 VAC MHTA CABLE ASSY 951656 POWER 220 VAC MHTA CABLE ASSY 956SD0004 TURBO CABLE 967SD0005 POWER TURBO CABLE 982-20 CABLE ASSY 161 982-21 CABLE ASSY 162 982-24 (P10) HARNESS 982-24 (P9) HARNESS A115378 REV B C/A, AIR VALVES (4G5) ACX-03201-13 ACX ADAPTIVE CONTROLLER W/ AC POWER AJX=X485 SOLID STATE DRIVER +45V POWER CABLE BEI ENCODER BEI ENCODER CABLE CDE-CBL-001 CDE PROBE CABLE D883545-01 CABLE ASSY M01-00003-00 REAR CHAMBER GAS BOX EXTENSION M01-00052-05 CABLE ASSY IB TO RF GEN M01-00053-06 CABLE ASSY IB TO RF GEN M01-00054-07 CABLE ASSY IB TO RF GEN M01-00055-08 CABEL ASSY IB TO RF GEN M01-00097-01 RF COAX M01-00133-01 CABLE ASSY AC BOX TO RF GEN M04-00006-00 CABLE ASSY ROTATION AND EXTENSION M22-00001-00 COMPUMOTOR MC2004029 147 CPU P2 ADAPTER CARD P3 CABLE EXTENDED FLOPPY /HD DR N01-00000-01 TURBO HEATER CONTROLLER PTIE-00085 INDEXER MOTOR HARNESS SXCCBL55C REM HEAD TO POWER GEN WA0032001 SHILDED RIBBON CABLE (40 POS) XLT-HDD-FDD RIBBON CABLE (50 POS)
